JPS57130426A - Exposure by electron rays - Google Patents

Exposure by electron rays

Info

Publication number
JPS57130426A
JPS57130426A JP1620481A JP1620481A JPS57130426A JP S57130426 A JPS57130426 A JP S57130426A JP 1620481 A JP1620481 A JP 1620481A JP 1620481 A JP1620481 A JP 1620481A JP S57130426 A JPS57130426 A JP S57130426A
Authority
JP
Japan
Prior art keywords
ridge
controller
memory
point
cpu1
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1620481A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6250053B2 (enrdf_load_stackoverflow
Inventor
Sakae Miyauchi
Kunio Takeuchi
Itsuo Yamamoto
Kaoru Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP1620481A priority Critical patent/JPS57130426A/ja
Publication of JPS57130426A publication Critical patent/JPS57130426A/ja
Publication of JPS6250053B2 publication Critical patent/JPS6250053B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control
    • H01J37/3023—Programme control

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
JP1620481A 1981-02-05 1981-02-05 Exposure by electron rays Granted JPS57130426A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1620481A JPS57130426A (en) 1981-02-05 1981-02-05 Exposure by electron rays

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1620481A JPS57130426A (en) 1981-02-05 1981-02-05 Exposure by electron rays

Publications (2)

Publication Number Publication Date
JPS57130426A true JPS57130426A (en) 1982-08-12
JPS6250053B2 JPS6250053B2 (enrdf_load_stackoverflow) 1987-10-22

Family

ID=11909975

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1620481A Granted JPS57130426A (en) 1981-02-05 1981-02-05 Exposure by electron rays

Country Status (1)

Country Link
JP (1) JPS57130426A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63199422A (ja) * 1987-02-16 1988-08-17 Toshiba Corp 荷電ビ−ム描画方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6347851U (enrdf_load_stackoverflow) * 1986-09-16 1988-03-31

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63199422A (ja) * 1987-02-16 1988-08-17 Toshiba Corp 荷電ビ−ム描画方法

Also Published As

Publication number Publication date
JPS6250053B2 (enrdf_load_stackoverflow) 1987-10-22

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