JPS6243544B2 - - Google Patents

Info

Publication number
JPS6243544B2
JPS6243544B2 JP56092335A JP9233581A JPS6243544B2 JP S6243544 B2 JPS6243544 B2 JP S6243544B2 JP 56092335 A JP56092335 A JP 56092335A JP 9233581 A JP9233581 A JP 9233581A JP S6243544 B2 JPS6243544 B2 JP S6243544B2
Authority
JP
Japan
Prior art keywords
polyamic acid
layer
acid composition
weight
formula
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56092335A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57208158A (en
Inventor
Kazunari Takemoto
Fumio Kataoka
Fusaji Shoji
Mitsuo Nakatani
Ataru Yokono
Tokio Isogai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP56092335A priority Critical patent/JPS57208158A/ja
Publication of JPS57208158A publication Critical patent/JPS57208158A/ja
Publication of JPS6243544B2 publication Critical patent/JPS6243544B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
  • Formation Of Insulating Films (AREA)
JP56092335A 1981-06-17 1981-06-17 Manufacture of multilayer wiring structure Granted JPS57208158A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56092335A JPS57208158A (en) 1981-06-17 1981-06-17 Manufacture of multilayer wiring structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56092335A JPS57208158A (en) 1981-06-17 1981-06-17 Manufacture of multilayer wiring structure

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2851884A Division JPS60121740A (ja) 1984-02-20 1984-02-20 多層配線構造体

Publications (2)

Publication Number Publication Date
JPS57208158A JPS57208158A (en) 1982-12-21
JPS6243544B2 true JPS6243544B2 (Direct) 1987-09-14

Family

ID=14051515

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56092335A Granted JPS57208158A (en) 1981-06-17 1981-06-17 Manufacture of multilayer wiring structure

Country Status (1)

Country Link
JP (1) JPS57208158A (Direct)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014154873A (ja) * 2013-02-08 2014-08-25 Ichia Technologies Inc 多層型フレキシブル印刷回路板及びその製造方法

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59119790A (ja) * 1982-12-24 1984-07-11 松下電器産業株式会社 多層印刷配線板およびその製造方法
JPS61121393A (ja) * 1984-11-19 1986-06-09 旭化成株式会社 多層配線板の製造方法
JPH025596A (ja) * 1988-06-24 1990-01-10 Nec Corp 多層配線基板の製造方法
JP2014216623A (ja) * 2013-04-30 2014-11-17 株式会社村田製作所 電子部品の製造方法及び電子部品
TW201741772A (zh) * 2016-02-26 2017-12-01 富士軟片股份有限公司 積層體的製造方法及半導體元件的製造方法
TWI830588B (zh) * 2016-08-01 2024-01-21 日商富士軟片股份有限公司 感光性樹脂組成物、硬化膜、積層體、硬化膜的製造方法、積層體的製造方法及半導體元件
JP6633767B2 (ja) * 2016-08-25 2020-01-22 富士フイルム株式会社 積層体の製造方法および電子デバイスの製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014154873A (ja) * 2013-02-08 2014-08-25 Ichia Technologies Inc 多層型フレキシブル印刷回路板及びその製造方法

Also Published As

Publication number Publication date
JPS57208158A (en) 1982-12-21

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