JPS6243543B2 - - Google Patents
Info
- Publication number
- JPS6243543B2 JPS6243543B2 JP3505680A JP3505680A JPS6243543B2 JP S6243543 B2 JPS6243543 B2 JP S6243543B2 JP 3505680 A JP3505680 A JP 3505680A JP 3505680 A JP3505680 A JP 3505680A JP S6243543 B2 JPS6243543 B2 JP S6243543B2
- Authority
- JP
- Japan
- Prior art keywords
- conductivity type
- region
- type
- layer
- opposite conductivity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 21
- 239000004065 semiconductor Substances 0.000 claims description 16
- 239000012535 impurity Substances 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 10
- 238000002955 isolation Methods 0.000 claims description 7
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 10
- 229910052796 boron Inorganic materials 0.000 description 10
- 238000000034 method Methods 0.000 description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- 230000000295 complement effect Effects 0.000 description 6
- 238000009792 diffusion process Methods 0.000 description 6
- 238000005468 ion implantation Methods 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/76297—Dielectric isolation using EPIC techniques, i.e. epitaxial passivated integrated circuit
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Element Separation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3505680A JPS56131942A (en) | 1980-03-19 | 1980-03-19 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3505680A JPS56131942A (en) | 1980-03-19 | 1980-03-19 | Manufacture of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56131942A JPS56131942A (en) | 1981-10-15 |
| JPS6243543B2 true JPS6243543B2 (US20100056889A1-20100304-C00004.png) | 1987-09-14 |
Family
ID=12431369
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3505680A Granted JPS56131942A (en) | 1980-03-19 | 1980-03-19 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56131942A (US20100056889A1-20100304-C00004.png) |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01135034U (US20100056889A1-20100304-C00004.png) * | 1988-12-16 | 1989-09-14 | ||
| JPH0433835Y2 (US20100056889A1-20100304-C00004.png) * | 1987-05-27 | 1992-08-12 | ||
| JPH0437582Y2 (US20100056889A1-20100304-C00004.png) * | 1987-05-11 | 1992-09-03 | ||
| JPH0446699Y2 (US20100056889A1-20100304-C00004.png) * | 1987-05-19 | 1992-11-04 | ||
| US8833987B2 (en) | 2005-09-14 | 2014-09-16 | Donnelly Corporation | Mirror reflective element sub-assembly for exterior rearview mirror of a vehicle |
| US8884788B2 (en) | 1998-04-08 | 2014-11-11 | Donnelly Corporation | Automotive communication system |
| US8908039B2 (en) | 2000-03-02 | 2014-12-09 | Donnelly Corporation | Vehicular video mirror system |
| US9073491B2 (en) | 2002-09-20 | 2015-07-07 | Donnelly Corporation | Exterior rearview mirror assembly |
| US9090211B2 (en) | 2002-09-20 | 2015-07-28 | Donnelly Corporation | Variable reflectance mirror reflective element for exterior mirror assembly |
| US9090213B2 (en) | 2004-12-15 | 2015-07-28 | Magna Electronics Inc. | Accessory mounting system for a vehicle |
| US9694749B2 (en) | 2001-01-23 | 2017-07-04 | Magna Electronics Inc. | Trailer hitching aid system for vehicle |
| US11308720B2 (en) | 2004-12-23 | 2022-04-19 | Magna Electronics Inc. | Vehicular imaging system |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07240534A (ja) * | 1993-03-16 | 1995-09-12 | Seiko Instr Inc | 光電変換半導体装置及びその製造方法 |
| TW512526B (en) * | 2000-09-07 | 2002-12-01 | Sanyo Electric Co | Semiconductor integrated circuit device and manufacturing method thereof |
| JP2002083876A (ja) * | 2000-09-07 | 2002-03-22 | Sanyo Electric Co Ltd | 半導体集積回路装置の製造方法 |
-
1980
- 1980-03-19 JP JP3505680A patent/JPS56131942A/ja active Granted
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0437582Y2 (US20100056889A1-20100304-C00004.png) * | 1987-05-11 | 1992-09-03 | ||
| JPH0446699Y2 (US20100056889A1-20100304-C00004.png) * | 1987-05-19 | 1992-11-04 | ||
| JPH0433835Y2 (US20100056889A1-20100304-C00004.png) * | 1987-05-27 | 1992-08-12 | ||
| JPH01135034U (US20100056889A1-20100304-C00004.png) * | 1988-12-16 | 1989-09-14 | ||
| US8884788B2 (en) | 1998-04-08 | 2014-11-11 | Donnelly Corporation | Automotive communication system |
| US8908039B2 (en) | 2000-03-02 | 2014-12-09 | Donnelly Corporation | Vehicular video mirror system |
| US9694749B2 (en) | 2001-01-23 | 2017-07-04 | Magna Electronics Inc. | Trailer hitching aid system for vehicle |
| US9073491B2 (en) | 2002-09-20 | 2015-07-07 | Donnelly Corporation | Exterior rearview mirror assembly |
| US9090211B2 (en) | 2002-09-20 | 2015-07-28 | Donnelly Corporation | Variable reflectance mirror reflective element for exterior mirror assembly |
| US9090213B2 (en) | 2004-12-15 | 2015-07-28 | Magna Electronics Inc. | Accessory mounting system for a vehicle |
| US11308720B2 (en) | 2004-12-23 | 2022-04-19 | Magna Electronics Inc. | Vehicular imaging system |
| US8833987B2 (en) | 2005-09-14 | 2014-09-16 | Donnelly Corporation | Mirror reflective element sub-assembly for exterior rearview mirror of a vehicle |
| US9045091B2 (en) | 2005-09-14 | 2015-06-02 | Donnelly Corporation | Mirror reflective element sub-assembly for exterior rearview mirror of a vehicle |
| US9694753B2 (en) | 2005-09-14 | 2017-07-04 | Magna Mirrors Of America, Inc. | Mirror reflective element sub-assembly for exterior rearview mirror of a vehicle |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56131942A (en) | 1981-10-15 |
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