JPS6241792B2 - - Google Patents
Info
- Publication number
- JPS6241792B2 JPS6241792B2 JP57215234A JP21523482A JPS6241792B2 JP S6241792 B2 JPS6241792 B2 JP S6241792B2 JP 57215234 A JP57215234 A JP 57215234A JP 21523482 A JP21523482 A JP 21523482A JP S6241792 B2 JPS6241792 B2 JP S6241792B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- processed
- nozzle
- processing apparatus
- spray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 30
- 239000007921 spray Substances 0.000 claims description 18
- 239000007788 liquid Substances 0.000 claims description 5
- 230000005226 mechanical processes and functions Effects 0.000 claims 1
- 238000000034 method Methods 0.000 description 15
- 238000005530 etching Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 238000004140 cleaning Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000005507 spraying Methods 0.000 description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 3
- 238000003672 processing method Methods 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 238000011161 development Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000010129 solution processing Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21523482A JPS59105865A (ja) | 1982-12-07 | 1982-12-07 | スプレ−処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21523482A JPS59105865A (ja) | 1982-12-07 | 1982-12-07 | スプレ−処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59105865A JPS59105865A (ja) | 1984-06-19 |
| JPS6241792B2 true JPS6241792B2 (ko) | 1987-09-04 |
Family
ID=16668930
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21523482A Granted JPS59105865A (ja) | 1982-12-07 | 1982-12-07 | スプレ−処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59105865A (ko) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102289120B1 (ko) * | 2021-04-20 | 2021-08-12 | 주식회사 세미안 | 전자현미경용 이온 스퍼터 및 이온 스퍼터용 시료 회전장치 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5540756U (ko) * | 1978-09-11 | 1980-03-15 |
-
1982
- 1982-12-07 JP JP21523482A patent/JPS59105865A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5540756U (ko) * | 1978-09-11 | 1980-03-15 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59105865A (ja) | 1984-06-19 |
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