JPS6239810B2 - - Google Patents

Info

Publication number
JPS6239810B2
JPS6239810B2 JP55041737A JP4173780A JPS6239810B2 JP S6239810 B2 JPS6239810 B2 JP S6239810B2 JP 55041737 A JP55041737 A JP 55041737A JP 4173780 A JP4173780 A JP 4173780A JP S6239810 B2 JPS6239810 B2 JP S6239810B2
Authority
JP
Japan
Prior art keywords
polycrystalline
substrate
sio
layer
semiconductor layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55041737A
Other languages
English (en)
Japanese (ja)
Other versions
JPS56138918A (en
Inventor
Osamu Hataishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP4173780A priority Critical patent/JPS56138918A/ja
Publication of JPS56138918A publication Critical patent/JPS56138918A/ja
Publication of JPS6239810B2 publication Critical patent/JPS6239810B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W10/011—
    • H10W10/10—

Landscapes

  • Formation Of Insulating Films (AREA)
  • Recrystallisation Techniques (AREA)
JP4173780A 1980-03-31 1980-03-31 Manufacture of semiconductor device Granted JPS56138918A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4173780A JPS56138918A (en) 1980-03-31 1980-03-31 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4173780A JPS56138918A (en) 1980-03-31 1980-03-31 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS56138918A JPS56138918A (en) 1981-10-29
JPS6239810B2 true JPS6239810B2 (enExample) 1987-08-25

Family

ID=12616730

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4173780A Granted JPS56138918A (en) 1980-03-31 1980-03-31 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS56138918A (enExample)

Also Published As

Publication number Publication date
JPS56138918A (en) 1981-10-29

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