JPS6236390B2 - - Google Patents
Info
- Publication number
- JPS6236390B2 JPS6236390B2 JP2540282A JP2540282A JPS6236390B2 JP S6236390 B2 JPS6236390 B2 JP S6236390B2 JP 2540282 A JP2540282 A JP 2540282A JP 2540282 A JP2540282 A JP 2540282A JP S6236390 B2 JPS6236390 B2 JP S6236390B2
- Authority
- JP
- Japan
- Prior art keywords
- silicon oxide
- oxide film
- film
- silicon
- element isolation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Local Oxidation Of Silicon (AREA)
- Element Separation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2540282A JPS58141538A (ja) | 1982-02-18 | 1982-02-18 | 集積回路装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2540282A JPS58141538A (ja) | 1982-02-18 | 1982-02-18 | 集積回路装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58141538A JPS58141538A (ja) | 1983-08-22 |
| JPS6236390B2 true JPS6236390B2 (en:Method) | 1987-08-06 |
Family
ID=12164906
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2540282A Granted JPS58141538A (ja) | 1982-02-18 | 1982-02-18 | 集積回路装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58141538A (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007290073A (ja) * | 2006-04-25 | 2007-11-08 | Matsushita Electric Works Ltd | 絶縁分離構造の形成方法 |
-
1982
- 1982-02-18 JP JP2540282A patent/JPS58141538A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007290073A (ja) * | 2006-04-25 | 2007-11-08 | Matsushita Electric Works Ltd | 絶縁分離構造の形成方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58141538A (ja) | 1983-08-22 |
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