JPS6235825B2 - - Google Patents
Info
- Publication number
- JPS6235825B2 JPS6235825B2 JP55015878A JP1587880A JPS6235825B2 JP S6235825 B2 JPS6235825 B2 JP S6235825B2 JP 55015878 A JP55015878 A JP 55015878A JP 1587880 A JP1587880 A JP 1587880A JP S6235825 B2 JPS6235825 B2 JP S6235825B2
- Authority
- JP
- Japan
- Prior art keywords
- coating
- container
- coating container
- semiconductor substrate
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000576 coating method Methods 0.000 claims description 94
- 239000011248 coating agent Substances 0.000 claims description 91
- 239000000758 substrate Substances 0.000 claims description 31
- 239000007788 liquid Substances 0.000 claims description 21
- 238000003780 insertion Methods 0.000 claims description 2
- 230000037431 insertion Effects 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 25
- 239000004065 semiconductor Substances 0.000 description 24
- 239000011521 glass Substances 0.000 description 16
- 239000005368 silicate glass Substances 0.000 description 12
- 238000004528 spin coating Methods 0.000 description 10
- 238000009792 diffusion process Methods 0.000 description 5
- 239000000428 dust Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 231100000331 toxic Toxicity 0.000 description 3
- 230000002588 toxic effect Effects 0.000 description 3
- 239000005388 borosilicate glass Substances 0.000 description 2
- 230000006837 decompression Effects 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 239000007790 solid phase Substances 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 231100000614 poison Toxicity 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000002341 toxic gas Substances 0.000 description 1
- 239000003440 toxic substance Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1587880A JPS56113377A (en) | 1980-02-12 | 1980-02-12 | Rotary coater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1587880A JPS56113377A (en) | 1980-02-12 | 1980-02-12 | Rotary coater |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56113377A JPS56113377A (en) | 1981-09-07 |
| JPS6235825B2 true JPS6235825B2 (ru) | 1987-08-04 |
Family
ID=11901042
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1587880A Granted JPS56113377A (en) | 1980-02-12 | 1980-02-12 | Rotary coater |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56113377A (ru) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5952563A (ja) * | 1982-09-20 | 1984-03-27 | Fujitsu Ltd | コ−テイング装置 |
| JPH02139915A (ja) * | 1988-11-21 | 1990-05-29 | Dainippon Screen Mfg Co Ltd | 乾式表面処理装置 |
| US5254367A (en) * | 1989-07-06 | 1993-10-19 | Tokyo Electron Limited | Coating method and apparatus |
| JPH03187217A (ja) * | 1989-12-15 | 1991-08-15 | Rohm Co Ltd | ウエハの表面処理装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5214639A (en) * | 1975-07-25 | 1977-02-03 | Hitachi Ltd | Rotary coating apparatus |
-
1980
- 1980-02-12 JP JP1587880A patent/JPS56113377A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5214639A (en) * | 1975-07-25 | 1977-02-03 | Hitachi Ltd | Rotary coating apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56113377A (en) | 1981-09-07 |
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