JPS6233182B2 - - Google Patents

Info

Publication number
JPS6233182B2
JPS6233182B2 JP60091683A JP9168385A JPS6233182B2 JP S6233182 B2 JPS6233182 B2 JP S6233182B2 JP 60091683 A JP60091683 A JP 60091683A JP 9168385 A JP9168385 A JP 9168385A JP S6233182 B2 JPS6233182 B2 JP S6233182B2
Authority
JP
Japan
Prior art keywords
wafer
chuck
chucking
gas
suction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP60091683A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61254437A (ja
Inventor
Ryoji Matsuyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP60091683A priority Critical patent/JPS61254437A/ja
Publication of JPS61254437A publication Critical patent/JPS61254437A/ja
Publication of JPS6233182B2 publication Critical patent/JPS6233182B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Feeding Of Workpieces (AREA)
  • Manipulator (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
  • Load-Engaging Elements For Cranes (AREA)
JP60091683A 1985-04-27 1985-04-27 ウエハ−チヤツク Granted JPS61254437A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60091683A JPS61254437A (ja) 1985-04-27 1985-04-27 ウエハ−チヤツク

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60091683A JPS61254437A (ja) 1985-04-27 1985-04-27 ウエハ−チヤツク

Publications (2)

Publication Number Publication Date
JPS61254437A JPS61254437A (ja) 1986-11-12
JPS6233182B2 true JPS6233182B2 (cs) 1987-07-20

Family

ID=14033292

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60091683A Granted JPS61254437A (ja) 1985-04-27 1985-04-27 ウエハ−チヤツク

Country Status (1)

Country Link
JP (1) JPS61254437A (cs)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0328029Y2 (cs) * 1985-05-30 1991-06-17
JPH0645092B2 (ja) * 1988-03-31 1994-06-15 住友特殊金属株式会社 吸引除去方法
US4969676A (en) * 1989-06-23 1990-11-13 At&T Bell Laboratories Air pressure pick-up tool
US5470420A (en) * 1992-07-31 1995-11-28 Eastman Kodak Company Apparatus for label application using Bernoulli Effect
JPH08264626A (ja) * 1994-04-28 1996-10-11 Hitachi Ltd 試料保持方法及び試料表面の流体処理方法並びにそれらの装置
US6331023B1 (en) * 2000-01-14 2001-12-18 Asm America, Inc. Gridded substrate transport spatula
US6935830B2 (en) * 2001-07-13 2005-08-30 Tru-Si Technologies, Inc. Alignment of semiconductor wafers and other articles
JP4565520B1 (ja) * 2009-04-14 2010-10-20 智雄 松下 板状体の搬送装置
JP5543813B2 (ja) * 2010-03-23 2014-07-09 日東電工株式会社 ワーク搬送方法およびワーク搬送装置
JP5697014B2 (ja) * 2010-05-26 2015-04-08 日本空圧システム株式会社 保持装置
JP6129565B2 (ja) * 2013-01-21 2017-05-17 リンテック株式会社 シート装着装置
CN104675840A (zh) * 2015-02-09 2015-06-03 德清晶生光电科技有限公司 一种晶体吸盘装置
CN104669086A (zh) * 2015-02-09 2015-06-03 德清晶生光电科技有限公司 一种晶体片倒角装置
JP6872382B2 (ja) * 2017-02-10 2021-05-19 株式会社ディスコ 加工装置及びウエーハの搬出方法
JP7021616B2 (ja) * 2018-08-06 2022-02-17 株式会社島津製作所 試料搬送装置
JP7576473B2 (ja) * 2021-01-22 2024-10-31 株式会社コガネイ 非接触搬送装置
CN112943753B (zh) * 2021-04-09 2022-06-24 浙江大学 一种扩张辐射流动机构

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4819825B1 (cs) * 1970-09-14 1973-06-16
JPS5525037B2 (cs) * 1972-10-04 1980-07-03
JPS572477B2 (cs) * 1974-03-01 1982-01-16
JPS5191459A (cs) * 1975-02-07 1976-08-11
JPS5447483A (en) * 1977-09-21 1979-04-14 Hitachi Ltd Holder of plate form objects

Also Published As

Publication number Publication date
JPS61254437A (ja) 1986-11-12

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