JPS6231622B2 - - Google Patents

Info

Publication number
JPS6231622B2
JPS6231622B2 JP16292180A JP16292180A JPS6231622B2 JP S6231622 B2 JPS6231622 B2 JP S6231622B2 JP 16292180 A JP16292180 A JP 16292180A JP 16292180 A JP16292180 A JP 16292180A JP S6231622 B2 JPS6231622 B2 JP S6231622B2
Authority
JP
Japan
Prior art keywords
wafer
rotary
rotary pot
resist liquid
spin coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16292180A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5787862A (en
Inventor
Kunya Shimazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP16292180A priority Critical patent/JPS5787862A/ja
Publication of JPS5787862A publication Critical patent/JPS5787862A/ja
Publication of JPS6231622B2 publication Critical patent/JPS6231622B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
    • B05C11/08—Spreading liquid or other fluent material by manipulating the work, e.g. tilting

Landscapes

  • Coating Apparatus (AREA)
JP16292180A 1980-11-19 1980-11-19 Rotary coating device Granted JPS5787862A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16292180A JPS5787862A (en) 1980-11-19 1980-11-19 Rotary coating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16292180A JPS5787862A (en) 1980-11-19 1980-11-19 Rotary coating device

Publications (2)

Publication Number Publication Date
JPS5787862A JPS5787862A (en) 1982-06-01
JPS6231622B2 true JPS6231622B2 (en, 2012) 1987-07-09

Family

ID=15763758

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16292180A Granted JPS5787862A (en) 1980-11-19 1980-11-19 Rotary coating device

Country Status (1)

Country Link
JP (1) JPS5787862A (en, 2012)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5933453A (ja) * 1982-08-19 1984-02-23 Toshiba Corp レジスト塗布装置
JPH0669545B2 (ja) * 1987-11-23 1994-09-07 タツモ株式会社 塗布装置
JP2603431B2 (ja) * 1993-12-15 1997-04-23 東京応化工業株式会社 塗布装置

Also Published As

Publication number Publication date
JPS5787862A (en) 1982-06-01

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