JPS5787862A - Rotary coating device - Google Patents
Rotary coating deviceInfo
- Publication number
- JPS5787862A JPS5787862A JP16292180A JP16292180A JPS5787862A JP S5787862 A JPS5787862 A JP S5787862A JP 16292180 A JP16292180 A JP 16292180A JP 16292180 A JP16292180 A JP 16292180A JP S5787862 A JPS5787862 A JP S5787862A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- liq
- resist
- rotating
- cover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
- B05C11/08—Spreading liquid or other fluent material by manipulating the work, e.g. tilting
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16292180A JPS5787862A (en) | 1980-11-19 | 1980-11-19 | Rotary coating device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16292180A JPS5787862A (en) | 1980-11-19 | 1980-11-19 | Rotary coating device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5787862A true JPS5787862A (en) | 1982-06-01 |
JPS6231622B2 JPS6231622B2 (ja) | 1987-07-09 |
Family
ID=15763758
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16292180A Granted JPS5787862A (en) | 1980-11-19 | 1980-11-19 | Rotary coating device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5787862A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5933453A (ja) * | 1982-08-19 | 1984-02-23 | Toshiba Corp | レジスト塗布装置 |
JPH01135565A (ja) * | 1987-11-23 | 1989-05-29 | Tatsumo Kk | 塗布装置 |
JPH0731924A (ja) * | 1993-12-15 | 1995-02-03 | Tokyo Ohka Kogyo Co Ltd | 塗布装置 |
-
1980
- 1980-11-19 JP JP16292180A patent/JPS5787862A/ja active Granted
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5933453A (ja) * | 1982-08-19 | 1984-02-23 | Toshiba Corp | レジスト塗布装置 |
JPH0250614B2 (ja) * | 1982-08-19 | 1990-11-02 | Tokyo Shibaura Electric Co | |
JPH01135565A (ja) * | 1987-11-23 | 1989-05-29 | Tatsumo Kk | 塗布装置 |
JPH0731924A (ja) * | 1993-12-15 | 1995-02-03 | Tokyo Ohka Kogyo Co Ltd | 塗布装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS6231622B2 (ja) | 1987-07-09 |
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