JPS6475073A - Substrate fixing tool for coating device - Google Patents
Substrate fixing tool for coating deviceInfo
- Publication number
- JPS6475073A JPS6475073A JP62229998A JP22999887A JPS6475073A JP S6475073 A JPS6475073 A JP S6475073A JP 62229998 A JP62229998 A JP 62229998A JP 22999887 A JP22999887 A JP 22999887A JP S6475073 A JPS6475073 A JP S6475073A
- Authority
- JP
- Japan
- Prior art keywords
- supporting arm
- substrate
- fixing tool
- coated
- pin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE:To prevent dust from swirling up and form a coating film without defects on a substrate such as semiconductor by making at least part of section periphery shape of a supporting arm of the fixing tool into a curving shape in the substrate fixing tool of a spin type coating device. CONSTITUTION:A supporting arm 1 is formed to extend radially from a base rotary axis 3 and at least part of its section periphery shape is formed in a curving shape. A substrate 4 to be coated, for instance, a square base, is placed on base axis 3 when coating, and in case of a pin type fixing tool, the same is fixed by a pin provided on the supporting arm 1. At that time, a spacer is provided in the neighborhood of the pin and a space of approximately several mm - several cm is provided between the substrate 4, to be coated and the supporting arm 1. When the same is revolved in said state, laminar flow around the supporting arm 1 flows smoothly along a curve of the supporting arm 1. The laminar flow, therefore, flows without a turbulence such as vortex or the like generated in a device heretofore available, and swirling of dust in the device is eliminated to be able to form a coating film without defects on the surface of the substrate 4 to be coated. Similar effect can be achieved for a suction fixing tool, too.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62229998A JPS6475073A (en) | 1987-09-14 | 1987-09-14 | Substrate fixing tool for coating device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62229998A JPS6475073A (en) | 1987-09-14 | 1987-09-14 | Substrate fixing tool for coating device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6475073A true JPS6475073A (en) | 1989-03-20 |
Family
ID=16900999
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62229998A Pending JPS6475073A (en) | 1987-09-14 | 1987-09-14 | Substrate fixing tool for coating device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6475073A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0395629U (en) * | 1990-01-18 | 1991-09-30 | ||
JP2008072115A (en) * | 2006-09-12 | 2008-03-27 | Semes Co Ltd | Chucking member and spin head, and chucking method using the same |
-
1987
- 1987-09-14 JP JP62229998A patent/JPS6475073A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0395629U (en) * | 1990-01-18 | 1991-09-30 | ||
JP2008072115A (en) * | 2006-09-12 | 2008-03-27 | Semes Co Ltd | Chucking member and spin head, and chucking method using the same |
US8256774B2 (en) | 2006-09-12 | 2012-09-04 | Semes Co., Ltd. | Chucking member and spin head and method for chucking substrate using the chucking member |
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