JPS6475073A - Substrate fixing tool for coating device - Google Patents

Substrate fixing tool for coating device

Info

Publication number
JPS6475073A
JPS6475073A JP62229998A JP22999887A JPS6475073A JP S6475073 A JPS6475073 A JP S6475073A JP 62229998 A JP62229998 A JP 62229998A JP 22999887 A JP22999887 A JP 22999887A JP S6475073 A JPS6475073 A JP S6475073A
Authority
JP
Japan
Prior art keywords
supporting arm
substrate
fixing tool
coated
pin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62229998A
Other languages
Japanese (ja)
Inventor
Yuji Osumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dai Nippon Printing Co Ltd
Original Assignee
Dai Nippon Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dai Nippon Printing Co Ltd filed Critical Dai Nippon Printing Co Ltd
Priority to JP62229998A priority Critical patent/JPS6475073A/en
Publication of JPS6475073A publication Critical patent/JPS6475073A/en
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE:To prevent dust from swirling up and form a coating film without defects on a substrate such as semiconductor by making at least part of section periphery shape of a supporting arm of the fixing tool into a curving shape in the substrate fixing tool of a spin type coating device. CONSTITUTION:A supporting arm 1 is formed to extend radially from a base rotary axis 3 and at least part of its section periphery shape is formed in a curving shape. A substrate 4 to be coated, for instance, a square base, is placed on base axis 3 when coating, and in case of a pin type fixing tool, the same is fixed by a pin provided on the supporting arm 1. At that time, a spacer is provided in the neighborhood of the pin and a space of approximately several mm - several cm is provided between the substrate 4, to be coated and the supporting arm 1. When the same is revolved in said state, laminar flow around the supporting arm 1 flows smoothly along a curve of the supporting arm 1. The laminar flow, therefore, flows without a turbulence such as vortex or the like generated in a device heretofore available, and swirling of dust in the device is eliminated to be able to form a coating film without defects on the surface of the substrate 4 to be coated. Similar effect can be achieved for a suction fixing tool, too.
JP62229998A 1987-09-14 1987-09-14 Substrate fixing tool for coating device Pending JPS6475073A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62229998A JPS6475073A (en) 1987-09-14 1987-09-14 Substrate fixing tool for coating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62229998A JPS6475073A (en) 1987-09-14 1987-09-14 Substrate fixing tool for coating device

Publications (1)

Publication Number Publication Date
JPS6475073A true JPS6475073A (en) 1989-03-20

Family

ID=16900999

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62229998A Pending JPS6475073A (en) 1987-09-14 1987-09-14 Substrate fixing tool for coating device

Country Status (1)

Country Link
JP (1) JPS6475073A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0395629U (en) * 1990-01-18 1991-09-30
JP2008072115A (en) * 2006-09-12 2008-03-27 Semes Co Ltd Chucking member and spin head, and chucking method using the same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0395629U (en) * 1990-01-18 1991-09-30
JP2008072115A (en) * 2006-09-12 2008-03-27 Semes Co Ltd Chucking member and spin head, and chucking method using the same
US8256774B2 (en) 2006-09-12 2012-09-04 Semes Co., Ltd. Chucking member and spin head and method for chucking substrate using the chucking member

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