JPS5247836A - Spin coater - Google Patents

Spin coater

Info

Publication number
JPS5247836A
JPS5247836A JP12409475A JP12409475A JPS5247836A JP S5247836 A JPS5247836 A JP S5247836A JP 12409475 A JP12409475 A JP 12409475A JP 12409475 A JP12409475 A JP 12409475A JP S5247836 A JPS5247836 A JP S5247836A
Authority
JP
Japan
Prior art keywords
spin coater
substrate
axis
revolving
round
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12409475A
Other languages
Japanese (ja)
Other versions
JPS5941788B2 (en
Inventor
Shuji Kondo
Kazuhiko Tsuji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP12409475A priority Critical patent/JPS5941788B2/en
Publication of JPS5247836A publication Critical patent/JPS5247836A/en
Publication of JPS5941788B2 publication Critical patent/JPS5941788B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)

Abstract

PURPOSE: A spin coater to apply thin film of homogeneous viscous fluid to a substrate by revolving the substrate both on its axis and round the other axis.
COPYRIGHT: (C)1977,JPO&Japio
JP12409475A 1975-10-14 1975-10-14 Rotary coating device Expired JPS5941788B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12409475A JPS5941788B2 (en) 1975-10-14 1975-10-14 Rotary coating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12409475A JPS5941788B2 (en) 1975-10-14 1975-10-14 Rotary coating device

Publications (2)

Publication Number Publication Date
JPS5247836A true JPS5247836A (en) 1977-04-16
JPS5941788B2 JPS5941788B2 (en) 1984-10-09

Family

ID=14876763

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12409475A Expired JPS5941788B2 (en) 1975-10-14 1975-10-14 Rotary coating device

Country Status (1)

Country Link
JP (1) JPS5941788B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57113869A (en) * 1980-12-29 1982-07-15 Fujitsu Ltd Coating method for resin liquid and coating method used for this
JPS61156114U (en) * 1985-03-19 1986-09-27
JPH03108714A (en) * 1989-08-21 1991-05-08 American Teleph & Telegr Co <Att> Manufacture of integrated circuit, and its device
US5095848A (en) * 1989-05-02 1992-03-17 Mitsubishi Denki Kabushiki Kaisha Spin coating apparatus using a tilting chuck
US5264246A (en) * 1989-05-02 1993-11-23 Mitsubishi Denki Kabushiki Kaisha Spin coating method

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57113869A (en) * 1980-12-29 1982-07-15 Fujitsu Ltd Coating method for resin liquid and coating method used for this
JPS61156114U (en) * 1985-03-19 1986-09-27
US5095848A (en) * 1989-05-02 1992-03-17 Mitsubishi Denki Kabushiki Kaisha Spin coating apparatus using a tilting chuck
US5264246A (en) * 1989-05-02 1993-11-23 Mitsubishi Denki Kabushiki Kaisha Spin coating method
JPH03108714A (en) * 1989-08-21 1991-05-08 American Teleph & Telegr Co <Att> Manufacture of integrated circuit, and its device

Also Published As

Publication number Publication date
JPS5941788B2 (en) 1984-10-09

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