JPS5247836A - Spin coater - Google Patents
Spin coaterInfo
- Publication number
- JPS5247836A JPS5247836A JP12409475A JP12409475A JPS5247836A JP S5247836 A JPS5247836 A JP S5247836A JP 12409475 A JP12409475 A JP 12409475A JP 12409475 A JP12409475 A JP 12409475A JP S5247836 A JPS5247836 A JP S5247836A
- Authority
- JP
- Japan
- Prior art keywords
- spin coater
- substrate
- axis
- revolving
- round
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Coating Apparatus (AREA)
Abstract
PURPOSE: A spin coater to apply thin film of homogeneous viscous fluid to a substrate by revolving the substrate both on its axis and round the other axis.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12409475A JPS5941788B2 (en) | 1975-10-14 | 1975-10-14 | Rotary coating device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12409475A JPS5941788B2 (en) | 1975-10-14 | 1975-10-14 | Rotary coating device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5247836A true JPS5247836A (en) | 1977-04-16 |
JPS5941788B2 JPS5941788B2 (en) | 1984-10-09 |
Family
ID=14876763
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12409475A Expired JPS5941788B2 (en) | 1975-10-14 | 1975-10-14 | Rotary coating device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5941788B2 (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57113869A (en) * | 1980-12-29 | 1982-07-15 | Fujitsu Ltd | Coating method for resin liquid and coating method used for this |
JPS61156114U (en) * | 1985-03-19 | 1986-09-27 | ||
JPH03108714A (en) * | 1989-08-21 | 1991-05-08 | American Teleph & Telegr Co <Att> | Manufacture of integrated circuit, and its device |
US5095848A (en) * | 1989-05-02 | 1992-03-17 | Mitsubishi Denki Kabushiki Kaisha | Spin coating apparatus using a tilting chuck |
US5264246A (en) * | 1989-05-02 | 1993-11-23 | Mitsubishi Denki Kabushiki Kaisha | Spin coating method |
-
1975
- 1975-10-14 JP JP12409475A patent/JPS5941788B2/en not_active Expired
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57113869A (en) * | 1980-12-29 | 1982-07-15 | Fujitsu Ltd | Coating method for resin liquid and coating method used for this |
JPS61156114U (en) * | 1985-03-19 | 1986-09-27 | ||
US5095848A (en) * | 1989-05-02 | 1992-03-17 | Mitsubishi Denki Kabushiki Kaisha | Spin coating apparatus using a tilting chuck |
US5264246A (en) * | 1989-05-02 | 1993-11-23 | Mitsubishi Denki Kabushiki Kaisha | Spin coating method |
JPH03108714A (en) * | 1989-08-21 | 1991-05-08 | American Teleph & Telegr Co <Att> | Manufacture of integrated circuit, and its device |
Also Published As
Publication number | Publication date |
---|---|
JPS5941788B2 (en) | 1984-10-09 |
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