JPS5349955A - Spin coating method - Google Patents

Spin coating method

Info

Publication number
JPS5349955A
JPS5349955A JP12462076A JP12462076A JPS5349955A JP S5349955 A JPS5349955 A JP S5349955A JP 12462076 A JP12462076 A JP 12462076A JP 12462076 A JP12462076 A JP 12462076A JP S5349955 A JPS5349955 A JP S5349955A
Authority
JP
Japan
Prior art keywords
coating method
spin coating
substrate surface
entire substrate
nearly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12462076A
Other languages
Japanese (ja)
Other versions
JPS5613377B2 (en
Inventor
Itsuo Fujii
Shinichi Sakawaki
Masamichi Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Holdings Corp
Original Assignee
Fuji Photo Film Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Photo Film Co Ltd filed Critical Fuji Photo Film Co Ltd
Priority to JP12462076A priority Critical patent/JPS5349955A/en
Priority to DE19772746519 priority patent/DE2746519A1/en
Publication of JPS5349955A publication Critical patent/JPS5349955A/en
Publication of JPS5613377B2 publication Critical patent/JPS5613377B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/40—Distributing applied liquids or other fluent materials by members moving relatively to surface
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G03F7/162—Coating on a rotating support, e.g. using a whirler or a spinner

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To secure a uniform thickness application film formation on the entire substrate surface by rotating the substrate after applying uniformly the application solution previously on nearly the entire substrate surface.
COPYRIGHT: (C)1978,JPO&Japio
JP12462076A 1976-10-18 1976-10-18 Spin coating method Granted JPS5349955A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP12462076A JPS5349955A (en) 1976-10-18 1976-10-18 Spin coating method
DE19772746519 DE2746519A1 (en) 1976-10-18 1977-10-17 Spreading of photoresist emulsion over plate - includes application from array of nozzles followed by plate spinning

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12462076A JPS5349955A (en) 1976-10-18 1976-10-18 Spin coating method

Publications (2)

Publication Number Publication Date
JPS5349955A true JPS5349955A (en) 1978-05-06
JPS5613377B2 JPS5613377B2 (en) 1981-03-27

Family

ID=14889914

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12462076A Granted JPS5349955A (en) 1976-10-18 1976-10-18 Spin coating method

Country Status (2)

Country Link
JP (1) JPS5349955A (en)
DE (1) DE2746519A1 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57192955A (en) * 1981-05-25 1982-11-27 Toppan Printing Co Ltd Developing method
JPS6242766A (en) * 1985-08-14 1987-02-24 Kyodo Printing Co Ltd Formation of coated film
JP2006263638A (en) * 2005-03-25 2006-10-05 Dainippon Printing Co Ltd Coater of coating liquid and method of coating
JP2007055846A (en) * 2005-08-24 2007-03-08 Tokyo Electron Ltd METHOD OF FORMING DIELECTRIC FILM HAVING ABOx TYPE PEROVSKITE CRYSTAL STRUCTURE

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4564280A (en) * 1982-10-28 1986-01-14 Fujitsu Limited Method and apparatus for developing resist film including a movable nozzle arm
JPS6145506A (en) * 1985-07-16 1986-03-05 三菱電機株式会社 Hooked ceiling
JPH07284715A (en) * 1994-04-15 1995-10-31 Dainippon Screen Mfg Co Ltd Device and method for applying treatment liquid
JPH08213308A (en) * 1994-11-29 1996-08-20 Tokyo Ohka Kogyo Co Ltd Coating method
DE10351963B4 (en) * 2003-11-07 2013-08-22 Süss Microtec Lithography Gmbh Process for coating semiconductor substrates
DE102020005723A1 (en) 2020-09-18 2022-03-24 Westsächsische Hochschule Zwickau Process for coating three-dimensional substrates with photostructurable resists

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5067578A (en) * 1973-10-15 1975-06-06

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5067578A (en) * 1973-10-15 1975-06-06

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57192955A (en) * 1981-05-25 1982-11-27 Toppan Printing Co Ltd Developing method
JPS6242766A (en) * 1985-08-14 1987-02-24 Kyodo Printing Co Ltd Formation of coated film
JP2006263638A (en) * 2005-03-25 2006-10-05 Dainippon Printing Co Ltd Coater of coating liquid and method of coating
JP4588506B2 (en) * 2005-03-25 2010-12-01 大日本印刷株式会社 Coating liquid coating apparatus and coating method
JP2007055846A (en) * 2005-08-24 2007-03-08 Tokyo Electron Ltd METHOD OF FORMING DIELECTRIC FILM HAVING ABOx TYPE PEROVSKITE CRYSTAL STRUCTURE

Also Published As

Publication number Publication date
DE2746519A1 (en) 1978-04-20
JPS5613377B2 (en) 1981-03-27

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