JPS5376747A - Forming method of insulation film - Google Patents
Forming method of insulation filmInfo
- Publication number
- JPS5376747A JPS5376747A JP15190376A JP15190376A JPS5376747A JP S5376747 A JPS5376747 A JP S5376747A JP 15190376 A JP15190376 A JP 15190376A JP 15190376 A JP15190376 A JP 15190376A JP S5376747 A JPS5376747 A JP S5376747A
- Authority
- JP
- Japan
- Prior art keywords
- insulation film
- forming method
- film
- coating
- heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: To form a uniform film by making combined use of rotation and heating in coating an insulation film on substrate surface.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15190376A JPS5376747A (en) | 1976-12-20 | 1976-12-20 | Forming method of insulation film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15190376A JPS5376747A (en) | 1976-12-20 | 1976-12-20 | Forming method of insulation film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5376747A true JPS5376747A (en) | 1978-07-07 |
Family
ID=15528702
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15190376A Pending JPS5376747A (en) | 1976-12-20 | 1976-12-20 | Forming method of insulation film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5376747A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60100434A (en) * | 1983-11-05 | 1985-06-04 | Mitsubishi Electric Corp | Insulating coated film treating device for semiconductor substrate |
US5294257A (en) * | 1991-10-28 | 1994-03-15 | International Business Machines Corporation | Edge masking spin tool |
US6750739B2 (en) | 2000-06-15 | 2004-06-15 | Matsushita Electric Industrial Co., Ltd. | Resonator and high-frequency filter |
-
1976
- 1976-12-20 JP JP15190376A patent/JPS5376747A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60100434A (en) * | 1983-11-05 | 1985-06-04 | Mitsubishi Electric Corp | Insulating coated film treating device for semiconductor substrate |
US5294257A (en) * | 1991-10-28 | 1994-03-15 | International Business Machines Corporation | Edge masking spin tool |
US6750739B2 (en) | 2000-06-15 | 2004-06-15 | Matsushita Electric Industrial Co., Ltd. | Resonator and high-frequency filter |
US6933811B2 (en) | 2000-06-15 | 2005-08-23 | Matsushita Electric Industrial Co., Ltd. | Resonator and high-frequency filter |
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