JPS51151738A - Apparatus for spin coating - Google Patents

Apparatus for spin coating

Info

Publication number
JPS51151738A
JPS51151738A JP7559675A JP7559675A JPS51151738A JP S51151738 A JPS51151738 A JP S51151738A JP 7559675 A JP7559675 A JP 7559675A JP 7559675 A JP7559675 A JP 7559675A JP S51151738 A JPS51151738 A JP S51151738A
Authority
JP
Japan
Prior art keywords
spin coating
liquid
photo
spin coater
uniform coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7559675A
Other languages
Japanese (ja)
Inventor
Hiroyuki Kondo
Mamoru Ozaki
Masatoshi Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7559675A priority Critical patent/JPS51151738A/en
Publication of JPS51151738A publication Critical patent/JPS51151738A/en
Pending legal-status Critical Current

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Landscapes

  • Coating Apparatus (AREA)

Abstract

PURPOSE: A spin coater for the uniform coating of photo-resist liquid without splashing back of the liquid.
COPYRIGHT: (C)1976,JPO&Japio
JP7559675A 1975-06-23 1975-06-23 Apparatus for spin coating Pending JPS51151738A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7559675A JPS51151738A (en) 1975-06-23 1975-06-23 Apparatus for spin coating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7559675A JPS51151738A (en) 1975-06-23 1975-06-23 Apparatus for spin coating

Publications (1)

Publication Number Publication Date
JPS51151738A true JPS51151738A (en) 1976-12-27

Family

ID=13580730

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7559675A Pending JPS51151738A (en) 1975-06-23 1975-06-23 Apparatus for spin coating

Country Status (1)

Country Link
JP (1) JPS51151738A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55163526A (en) * 1979-11-16 1980-12-19 Sony Corp Production of screen for projection

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS493462B1 (en) * 1970-10-06 1974-01-26

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS493462B1 (en) * 1970-10-06 1974-01-26

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55163526A (en) * 1979-11-16 1980-12-19 Sony Corp Production of screen for projection
JPS586933B2 (en) * 1979-11-16 1983-02-07 ソニー株式会社 Method of manufacturing a projection screen

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