JPS5397041A - Thin film coater - Google Patents
Thin film coaterInfo
- Publication number
- JPS5397041A JPS5397041A JP1140077A JP1140077A JPS5397041A JP S5397041 A JPS5397041 A JP S5397041A JP 1140077 A JP1140077 A JP 1140077A JP 1140077 A JP1140077 A JP 1140077A JP S5397041 A JPS5397041 A JP S5397041A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- film coater
- coater
- swibelling
- furnishing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To apply a thin film of a photo-resist, etc., with uniform thickness, to a substrate placed on a spinning table, by furnishing the table with a universal swibelling mechanism.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1140077A JPS5397041A (en) | 1977-02-03 | 1977-02-03 | Thin film coater |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1140077A JPS5397041A (en) | 1977-02-03 | 1977-02-03 | Thin film coater |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5397041A true JPS5397041A (en) | 1978-08-24 |
Family
ID=11776955
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1140077A Pending JPS5397041A (en) | 1977-02-03 | 1977-02-03 | Thin film coater |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5397041A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57112756A (en) * | 1980-12-29 | 1982-07-13 | Fujitsu Ltd | Rotary spin processor turned upside down |
JPS6482628A (en) * | 1987-09-25 | 1989-03-28 | Toshiba Corp | Photoresist processing device |
JP2010253341A (en) * | 2009-04-22 | 2010-11-11 | Toppan Printing Co Ltd | Application apparatus |
-
1977
- 1977-02-03 JP JP1140077A patent/JPS5397041A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57112756A (en) * | 1980-12-29 | 1982-07-13 | Fujitsu Ltd | Rotary spin processor turned upside down |
JPS6482628A (en) * | 1987-09-25 | 1989-03-28 | Toshiba Corp | Photoresist processing device |
JP2010253341A (en) * | 2009-04-22 | 2010-11-11 | Toppan Printing Co Ltd | Application apparatus |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS52112632A (en) | Thermosetting resinous composition for coating | |
JPS5228875A (en) | Mask | |
JPS5224521A (en) | Data co-photographing system | |
JPS5250203A (en) | Magnetic transfer recording material | |
JPS5228926A (en) | Process for film coating of medicines | |
JPS5397041A (en) | Thin film coater | |
JPS5437752A (en) | Fixing device | |
JPS5247836A (en) | Spin coater | |
JPS5215335A (en) | Pressure roller fixing device | |
JPS5385170A (en) | Soft x-ray transfer mask | |
JPS5329346A (en) | Process of electrodeposition | |
JPS51130192A (en) | The process of manufacture for illminative optical solid display sabst ace | |
JPS5230844A (en) | Coating roll | |
JPS5399772A (en) | Optical mask | |
JPS527595A (en) | Apparatus for positioning transweb member for bent outer plate or the like | |
JPS51140573A (en) | Photo-resist coating device | |
JPS51135664A (en) | Method for producing a deflecting plate | |
JPS5210106A (en) | Revolving sheet device | |
JPS5236176A (en) | Laminate | |
JPS5233927A (en) | Photograph mount | |
JPS53111558A (en) | Cooler | |
JPS53125856A (en) | Optical fiber coating apparatus | |
JPS5426876A (en) | Surface-protected plastic plate and its preparation | |
JPS5243832A (en) | Adhesive composition | |
JPS533168A (en) | Semiconductor evaporating apparatus |