JPS5397041A - Thin film coater - Google Patents

Thin film coater

Info

Publication number
JPS5397041A
JPS5397041A JP1140077A JP1140077A JPS5397041A JP S5397041 A JPS5397041 A JP S5397041A JP 1140077 A JP1140077 A JP 1140077A JP 1140077 A JP1140077 A JP 1140077A JP S5397041 A JPS5397041 A JP S5397041A
Authority
JP
Japan
Prior art keywords
thin film
film coater
coater
swibelling
furnishing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1140077A
Other languages
Japanese (ja)
Inventor
Yasuo Kinoshita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP1140077A priority Critical patent/JPS5397041A/en
Publication of JPS5397041A publication Critical patent/JPS5397041A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To apply a thin film of a photo-resist, etc., with uniform thickness, to a substrate placed on a spinning table, by furnishing the table with a universal swibelling mechanism.
COPYRIGHT: (C)1978,JPO&Japio
JP1140077A 1977-02-03 1977-02-03 Thin film coater Pending JPS5397041A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1140077A JPS5397041A (en) 1977-02-03 1977-02-03 Thin film coater

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1140077A JPS5397041A (en) 1977-02-03 1977-02-03 Thin film coater

Publications (1)

Publication Number Publication Date
JPS5397041A true JPS5397041A (en) 1978-08-24

Family

ID=11776955

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1140077A Pending JPS5397041A (en) 1977-02-03 1977-02-03 Thin film coater

Country Status (1)

Country Link
JP (1) JPS5397041A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57112756A (en) * 1980-12-29 1982-07-13 Fujitsu Ltd Rotary spin processor turned upside down
JPS6482628A (en) * 1987-09-25 1989-03-28 Toshiba Corp Photoresist processing device
JP2010253341A (en) * 2009-04-22 2010-11-11 Toppan Printing Co Ltd Application apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57112756A (en) * 1980-12-29 1982-07-13 Fujitsu Ltd Rotary spin processor turned upside down
JPS6482628A (en) * 1987-09-25 1989-03-28 Toshiba Corp Photoresist processing device
JP2010253341A (en) * 2009-04-22 2010-11-11 Toppan Printing Co Ltd Application apparatus

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