JPS522164A - Wafer cleaning and drying device - Google Patents
Wafer cleaning and drying deviceInfo
- Publication number
- JPS522164A JPS522164A JP7657375A JP7657375A JPS522164A JP S522164 A JPS522164 A JP S522164A JP 7657375 A JP7657375 A JP 7657375A JP 7657375 A JP7657375 A JP 7657375A JP S522164 A JPS522164 A JP S522164A
- Authority
- JP
- Japan
- Prior art keywords
- drying device
- wafer cleaning
- cleaning
- wafer
- drying
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
PURPOSE: To prevent vortex to enable clean cleaning and drying by providing ceiling plate on top of a wafer container of a wafer cleaning and drying device.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7657375A JPS522164A (en) | 1975-06-24 | 1975-06-24 | Wafer cleaning and drying device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7657375A JPS522164A (en) | 1975-06-24 | 1975-06-24 | Wafer cleaning and drying device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS522164A true JPS522164A (en) | 1977-01-08 |
JPS5324776B2 JPS5324776B2 (en) | 1978-07-22 |
Family
ID=13608973
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7657375A Granted JPS522164A (en) | 1975-06-24 | 1975-06-24 | Wafer cleaning and drying device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS522164A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5586963A (en) * | 1978-12-22 | 1980-07-01 | Hitachi Ltd | Sealing device |
US5069236A (en) * | 1990-03-07 | 1991-12-03 | Pathway Systems, Inc. | Method and apparatus for cleaning disks |
US5107880A (en) * | 1990-03-07 | 1992-04-28 | Pathway Systems, Inc. | Disk cleaning apparatus |
-
1975
- 1975-06-24 JP JP7657375A patent/JPS522164A/en active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5586963A (en) * | 1978-12-22 | 1980-07-01 | Hitachi Ltd | Sealing device |
US5069236A (en) * | 1990-03-07 | 1991-12-03 | Pathway Systems, Inc. | Method and apparatus for cleaning disks |
US5107880A (en) * | 1990-03-07 | 1992-04-28 | Pathway Systems, Inc. | Disk cleaning apparatus |
Also Published As
Publication number | Publication date |
---|---|
JPS5324776B2 (en) | 1978-07-22 |
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