JPS5364472A - Processing apparatus - Google Patents

Processing apparatus

Info

Publication number
JPS5364472A
JPS5364472A JP13957976A JP13957976A JPS5364472A JP S5364472 A JPS5364472 A JP S5364472A JP 13957976 A JP13957976 A JP 13957976A JP 13957976 A JP13957976 A JP 13957976A JP S5364472 A JPS5364472 A JP S5364472A
Authority
JP
Japan
Prior art keywords
processing apparatus
side wall
wall surface
treatment room
inside side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13957976A
Other languages
Japanese (ja)
Inventor
Susumu Kano
Takao Kawanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13957976A priority Critical patent/JPS5364472A/en
Publication of JPS5364472A publication Critical patent/JPS5364472A/en
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)

Abstract

PURPOSE: To maintain the environment in a treatment room in a satisfactory state by letting a liquid form substance form substance fall onto the inside side wall surface of the treatment room from the upper part of the inside side wall surface to the lower part.
COPYRIGHT: (C)1978,JPO&Japio
JP13957976A 1976-11-22 1976-11-22 Processing apparatus Pending JPS5364472A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13957976A JPS5364472A (en) 1976-11-22 1976-11-22 Processing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13957976A JPS5364472A (en) 1976-11-22 1976-11-22 Processing apparatus

Publications (1)

Publication Number Publication Date
JPS5364472A true JPS5364472A (en) 1978-06-08

Family

ID=15248536

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13957976A Pending JPS5364472A (en) 1976-11-22 1976-11-22 Processing apparatus

Country Status (1)

Country Link
JP (1) JPS5364472A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59176677U (en) * 1983-05-09 1984-11-26 日本コロムビア株式会社 Rotary coating machine
US4688918A (en) * 1985-06-05 1987-08-25 Mitsubishi Denki Kabushiki Kaisha Negative type photoresist developing apparatus
US4755844A (en) * 1985-04-30 1988-07-05 Kabushiki Kaisha Toshiba Automatic developing device
JPH0390431U (en) * 1989-12-28 1991-09-13

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59176677U (en) * 1983-05-09 1984-11-26 日本コロムビア株式会社 Rotary coating machine
US4755844A (en) * 1985-04-30 1988-07-05 Kabushiki Kaisha Toshiba Automatic developing device
US4688918A (en) * 1985-06-05 1987-08-25 Mitsubishi Denki Kabushiki Kaisha Negative type photoresist developing apparatus
JPH0390431U (en) * 1989-12-28 1991-09-13

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