JPS5230263A - Cold trap device - Google Patents

Cold trap device

Info

Publication number
JPS5230263A
JPS5230263A JP10626375A JP10626375A JPS5230263A JP S5230263 A JPS5230263 A JP S5230263A JP 10626375 A JP10626375 A JP 10626375A JP 10626375 A JP10626375 A JP 10626375A JP S5230263 A JPS5230263 A JP S5230263A
Authority
JP
Japan
Prior art keywords
cold trap
trap device
voume
device capable
high efficiency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10626375A
Other languages
Japanese (ja)
Other versions
JPS5315994B2 (en
Inventor
Kazuo Tanida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP10626375A priority Critical patent/JPS5230263A/en
Publication of JPS5230263A publication Critical patent/JPS5230263A/en
Publication of JPS5315994B2 publication Critical patent/JPS5315994B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: A cold trap device capable of separating small voume of specific gas contained in the object gas at high efficiency.
COPYRIGHT: (C)1977,JPO&Japio
JP10626375A 1975-09-02 1975-09-02 Cold trap device Granted JPS5230263A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10626375A JPS5230263A (en) 1975-09-02 1975-09-02 Cold trap device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10626375A JPS5230263A (en) 1975-09-02 1975-09-02 Cold trap device

Publications (2)

Publication Number Publication Date
JPS5230263A true JPS5230263A (en) 1977-03-07
JPS5315994B2 JPS5315994B2 (en) 1978-05-29

Family

ID=14429198

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10626375A Granted JPS5230263A (en) 1975-09-02 1975-09-02 Cold trap device

Country Status (1)

Country Link
JP (1) JPS5230263A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62134120A (en) * 1985-12-05 1987-06-17 Honda Motor Co Ltd Three dimensional bending device for angular pipe
JPS62187604U (en) * 1986-05-19 1987-11-28
JP2004538127A (en) * 2001-03-23 2004-12-24 エムケイエス インスツルメンツ，インコーポレイテッド Capture device and method for condensable by-products of deposition reactions

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62134120A (en) * 1985-12-05 1987-06-17 Honda Motor Co Ltd Three dimensional bending device for angular pipe
JPS62187604U (en) * 1986-05-19 1987-11-28
JPH0225441Y2 (en) * 1986-05-19 1990-07-12
JP2004538127A (en) * 2001-03-23 2004-12-24 エムケイエス インスツルメンツ，インコーポレイテッド Capture device and method for condensable by-products of deposition reactions

Also Published As

Publication number Publication date
JPS5315994B2 (en) 1978-05-29

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