JPS5586963A - Sealing device - Google Patents

Sealing device

Info

Publication number
JPS5586963A
JPS5586963A JP15744578A JP15744578A JPS5586963A JP S5586963 A JPS5586963 A JP S5586963A JP 15744578 A JP15744578 A JP 15744578A JP 15744578 A JP15744578 A JP 15744578A JP S5586963 A JPS5586963 A JP S5586963A
Authority
JP
Japan
Prior art keywords
shaft
packing
piece
groove
projection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15744578A
Other languages
Japanese (ja)
Inventor
Hiroto Nagatomo
Hisao Seki
Tetsuya Takagaki
Shiro Terasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15744578A priority Critical patent/JPS5586963A/en
Priority to US06/061,049 priority patent/US4282825A/en
Priority to DE19792931308 priority patent/DE2931308A1/en
Publication of JPS5586963A publication Critical patent/JPS5586963A/en
Pending legal-status Critical Current

Links

Landscapes

  • Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
  • Sealing Of Bearings (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

PURPOSE: To eliminate production of dust from a seal, by sealing a rotational shaft with a labyrinth packing and forming a large space for reservoiring water between a groove on the lower fixed piece and a projection on the upper movable piece of the packing.
CONSTITUTION: A rotational shaft 20 which is projected in a flushing chamber is set to a holder 21 through a bearing 22. A lower fixing piece 24 of a labyrinth packing 23 is fixed to the upper surface of the holder and the shaft 20 is fit in the center hole, while an upper movable piece 25 of the packing 23 is fixed to the shaft 20 and intermeshed with the lower fixing piece 24. In other words, grooves 26 and projections 27 are formed, alternately and concentrically with the shaft 20 as the center, on the lower fixing piece 24 and the upper movable piece 25, respectively and intermeshed with each other. In addition, a specific projection 29 to be engaged with a groove 28 is formed lower than other projections 27 to form a large space between the groove 28 and the projection 29.
COPYRIGHT: (C)1980,JPO&Japio
JP15744578A 1978-08-02 1978-12-22 Sealing device Pending JPS5586963A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP15744578A JPS5586963A (en) 1978-12-22 1978-12-22 Sealing device
US06/061,049 US4282825A (en) 1978-08-02 1979-07-26 Surface treatment device
DE19792931308 DE2931308A1 (en) 1978-08-02 1979-08-01 SURFACE TREATMENT DEVICE

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15744578A JPS5586963A (en) 1978-12-22 1978-12-22 Sealing device

Publications (1)

Publication Number Publication Date
JPS5586963A true JPS5586963A (en) 1980-07-01

Family

ID=15649804

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15744578A Pending JPS5586963A (en) 1978-08-02 1978-12-22 Sealing device

Country Status (1)

Country Link
JP (1) JPS5586963A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4691722A (en) * 1984-08-01 1987-09-08 Fsi Corporation Bowl for liquid spray processing machine
JPS63152654U (en) * 1987-03-24 1988-10-06
JPS6422030U (en) * 1987-07-30 1989-02-03

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS522164A (en) * 1975-06-24 1977-01-08 Hitachi Ltd Wafer cleaning and drying device
JPS5346443U (en) * 1976-09-27 1978-04-20

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS522164A (en) * 1975-06-24 1977-01-08 Hitachi Ltd Wafer cleaning and drying device
JPS5346443U (en) * 1976-09-27 1978-04-20

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4691722A (en) * 1984-08-01 1987-09-08 Fsi Corporation Bowl for liquid spray processing machine
JPS63152654U (en) * 1987-03-24 1988-10-06
JPS6422030U (en) * 1987-07-30 1989-02-03

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