JPS5586963A - Sealing device - Google Patents
Sealing deviceInfo
- Publication number
- JPS5586963A JPS5586963A JP15744578A JP15744578A JPS5586963A JP S5586963 A JPS5586963 A JP S5586963A JP 15744578 A JP15744578 A JP 15744578A JP 15744578 A JP15744578 A JP 15744578A JP S5586963 A JPS5586963 A JP S5586963A
- Authority
- JP
- Japan
- Prior art keywords
- shaft
- packing
- piece
- groove
- projection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
- Sealing Of Bearings (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
PURPOSE: To eliminate production of dust from a seal, by sealing a rotational shaft with a labyrinth packing and forming a large space for reservoiring water between a groove on the lower fixed piece and a projection on the upper movable piece of the packing.
CONSTITUTION: A rotational shaft 20 which is projected in a flushing chamber is set to a holder 21 through a bearing 22. A lower fixing piece 24 of a labyrinth packing 23 is fixed to the upper surface of the holder and the shaft 20 is fit in the center hole, while an upper movable piece 25 of the packing 23 is fixed to the shaft 20 and intermeshed with the lower fixing piece 24. In other words, grooves 26 and projections 27 are formed, alternately and concentrically with the shaft 20 as the center, on the lower fixing piece 24 and the upper movable piece 25, respectively and intermeshed with each other. In addition, a specific projection 29 to be engaged with a groove 28 is formed lower than other projections 27 to form a large space between the groove 28 and the projection 29.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15744578A JPS5586963A (en) | 1978-12-22 | 1978-12-22 | Sealing device |
US06/061,049 US4282825A (en) | 1978-08-02 | 1979-07-26 | Surface treatment device |
DE19792931308 DE2931308A1 (en) | 1978-08-02 | 1979-08-01 | SURFACE TREATMENT DEVICE |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15744578A JPS5586963A (en) | 1978-12-22 | 1978-12-22 | Sealing device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5586963A true JPS5586963A (en) | 1980-07-01 |
Family
ID=15649804
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15744578A Pending JPS5586963A (en) | 1978-08-02 | 1978-12-22 | Sealing device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5586963A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4691722A (en) * | 1984-08-01 | 1987-09-08 | Fsi Corporation | Bowl for liquid spray processing machine |
JPS63152654U (en) * | 1987-03-24 | 1988-10-06 | ||
JPS6422030U (en) * | 1987-07-30 | 1989-02-03 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS522164A (en) * | 1975-06-24 | 1977-01-08 | Hitachi Ltd | Wafer cleaning and drying device |
JPS5346443U (en) * | 1976-09-27 | 1978-04-20 |
-
1978
- 1978-12-22 JP JP15744578A patent/JPS5586963A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS522164A (en) * | 1975-06-24 | 1977-01-08 | Hitachi Ltd | Wafer cleaning and drying device |
JPS5346443U (en) * | 1976-09-27 | 1978-04-20 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4691722A (en) * | 1984-08-01 | 1987-09-08 | Fsi Corporation | Bowl for liquid spray processing machine |
JPS63152654U (en) * | 1987-03-24 | 1988-10-06 | ||
JPS6422030U (en) * | 1987-07-30 | 1989-02-03 |
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