JPS56112724A - Spinner head - Google Patents

Spinner head

Info

Publication number
JPS56112724A
JPS56112724A JP1428080A JP1428080A JPS56112724A JP S56112724 A JPS56112724 A JP S56112724A JP 1428080 A JP1428080 A JP 1428080A JP 1428080 A JP1428080 A JP 1428080A JP S56112724 A JPS56112724 A JP S56112724A
Authority
JP
Japan
Prior art keywords
base
viscous fluid
spinner head
substrate
disk
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1428080A
Other languages
Japanese (ja)
Other versions
JPS5928046B2 (en
Inventor
Masaaki Matsuura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Nippon Chemical Industrial Co Ltd
Original Assignee
Nippon Chemical Industrial Co Ltd
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Chemical Industrial Co Ltd, Nippon Kogaku KK filed Critical Nippon Chemical Industrial Co Ltd
Priority to JP55014280A priority Critical patent/JPS5928046B2/en
Publication of JPS56112724A publication Critical patent/JPS56112724A/en
Publication of JPS5928046B2 publication Critical patent/JPS5928046B2/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G03F7/162—Coating on a rotating support, e.g. using a whirler or a spinner

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Coating Apparatus (AREA)

Abstract

PURPOSE:To remove the raised part of a coated viscous fluid by providing a planar substrate placing base inclined toward the rotating central axis of the spinner head. CONSTITUTION:The planer oblique base 4 is provided at a position out of the central axis of the spinner head formed of a rotary shaft 2 and a disk 3. The inclining angle of the base 4 and the number of revolution of the disk 3 are suitably determined, and the viscous fluid such as photoresist or the like is covered on the substrate 5 placed on the base 4. Since excessive photoresist is thus isolated from the substrate 5, the raised part of the coated viscous fluid can be almost removed.
JP55014280A 1980-02-09 1980-02-09 spinner head Expired JPS5928046B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55014280A JPS5928046B2 (en) 1980-02-09 1980-02-09 spinner head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55014280A JPS5928046B2 (en) 1980-02-09 1980-02-09 spinner head

Publications (2)

Publication Number Publication Date
JPS56112724A true JPS56112724A (en) 1981-09-05
JPS5928046B2 JPS5928046B2 (en) 1984-07-10

Family

ID=11856672

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55014280A Expired JPS5928046B2 (en) 1980-02-09 1980-02-09 spinner head

Country Status (1)

Country Link
JP (1) JPS5928046B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60248259A (en) * 1984-05-23 1985-12-07 Matsushita Electric Ind Co Ltd Formation of resinous film
JPS6455838A (en) * 1987-08-27 1989-03-02 Mitsubishi Electric Corp Substrate supporter for semiconductor device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS508733A (en) * 1973-05-29 1975-01-29

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS508733A (en) * 1973-05-29 1975-01-29

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60248259A (en) * 1984-05-23 1985-12-07 Matsushita Electric Ind Co Ltd Formation of resinous film
JPH058070B2 (en) * 1984-05-23 1993-02-01 Matsushita Electric Ind Co Ltd
JPS6455838A (en) * 1987-08-27 1989-03-02 Mitsubishi Electric Corp Substrate supporter for semiconductor device

Also Published As

Publication number Publication date
JPS5928046B2 (en) 1984-07-10

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