JPS508733A - - Google Patents
Info
- Publication number
- JPS508733A JPS508733A JP6007873A JP6007873A JPS508733A JP S508733 A JPS508733 A JP S508733A JP 6007873 A JP6007873 A JP 6007873A JP 6007873 A JP6007873 A JP 6007873A JP S508733 A JPS508733 A JP S508733A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6007873A JPS508733A (en) | 1973-05-29 | 1973-05-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6007873A JPS508733A (en) | 1973-05-29 | 1973-05-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS508733A true JPS508733A (en) | 1975-01-29 |
Family
ID=13131679
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6007873A Pending JPS508733A (en) | 1973-05-29 | 1973-05-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS508733A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56112724A (en) * | 1980-02-09 | 1981-09-05 | Nippon Kogaku Kk <Nikon> | Spinner head |
| JPS58111320A (en) * | 1981-12-25 | 1983-07-02 | Hitachi Ltd | Spinner |
| WO1999031304A1 (en) * | 1997-12-16 | 1999-06-24 | Ebara Corporation | Plating device and method of confirming current feed |
-
1973
- 1973-05-29 JP JP6007873A patent/JPS508733A/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56112724A (en) * | 1980-02-09 | 1981-09-05 | Nippon Kogaku Kk <Nikon> | Spinner head |
| JPS5928046B2 (en) * | 1980-02-09 | 1984-07-10 | 株式会社ニコン | spinner head |
| JPS58111320A (en) * | 1981-12-25 | 1983-07-02 | Hitachi Ltd | Spinner |
| WO1999031304A1 (en) * | 1997-12-16 | 1999-06-24 | Ebara Corporation | Plating device and method of confirming current feed |
| US6500317B1 (en) | 1997-12-16 | 2002-12-31 | Ebara Corporation | Plating apparatus for detecting the conductivity between plating contacts on a substrate |