JPS60143871A - Coating device of resist - Google Patents

Coating device of resist

Info

Publication number
JPS60143871A
JPS60143871A JP25058383A JP25058383A JPS60143871A JP S60143871 A JPS60143871 A JP S60143871A JP 25058383 A JP25058383 A JP 25058383A JP 25058383 A JP25058383 A JP 25058383A JP S60143871 A JPS60143871 A JP S60143871A
Authority
JP
Grant status
Application
Patent type
Prior art keywords
substrate
resist
rotating
constitution
film thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP25058383A
Inventor
Yasuharu Sato
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Abstract

PURPOSE: To achieve coating of resist with uniform distribution of film thickness by providing a closed cup covering a substrate, having an opening on its periphery, and rotating synchronously with or independently of the rotation of the substrate.
CONSTITUTION: A rotary head 4 for fixing a substrate to be coated with resist and rotating the substrate, and closed cups 21, 22 for covering the substrate 10 and the whole body of the rotary head 4 and rotating around the same center as the center of the substrate 10 are provided. By this constitution, coating of resist with uniform distribution of film thickness is possible because change of viscosity and splash of resist are not caused.
COPYRIGHT: (C)1985,JPO&Japio
JP25058383A 1983-12-28 1983-12-28 Coating device of resist Pending JPS60143871A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25058383A JPS60143871A (en) 1983-12-28 1983-12-28 Coating device of resist

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25058383A JPS60143871A (en) 1983-12-28 1983-12-28 Coating device of resist

Publications (1)

Publication Number Publication Date
JPS60143871A true true JPS60143871A (en) 1985-07-30

Family

ID=17210044

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25058383A Pending JPS60143871A (en) 1983-12-28 1983-12-28 Coating device of resist

Country Status (1)

Country Link
JP (1) JPS60143871A (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0185209A2 (en) * 1984-12-21 1986-06-25 International Business Machines Corporation Magnetic disk coating method and apparatus
JPS63248471A (en) * 1987-04-03 1988-10-14 Tokyo Electron Ltd Coating device
JPH02123362A (en) * 1988-11-01 1990-05-10 Fujitsu Ltd Method and device for application of resist
JPH0399431U (en) * 1990-01-30 1991-10-17
US5069156A (en) * 1989-03-22 1991-12-03 Fujitsu Limited Spin coating apparatus for forming a photoresist film over a substrate having a non-circular outer shape
JPH04146615A (en) * 1990-10-08 1992-05-20 Tatsumo Kk Rotating cup type chemical solution treatment device in semiconductor growth process
US5234499A (en) * 1990-06-26 1993-08-10 Dainippon Screen Mgf. Co., Ltd. Spin coating apparatus
US5908661A (en) * 1997-05-30 1999-06-01 The Fairchild Corporation Apparatus and method for spin coating substrates
US5916631A (en) * 1997-05-30 1999-06-29 The Fairchild Corporation Method and apparatus for spin-coating chemicals

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5139737A (en) * 1974-10-01 1976-04-02 Canon Kk Hakusotofuyosupinnaa
JPS5412670A (en) * 1977-06-30 1979-01-30 Matsushita Electric Ind Co Ltd Viscous agnent coating device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5139737A (en) * 1974-10-01 1976-04-02 Canon Kk Hakusotofuyosupinnaa
JPS5412670A (en) * 1977-06-30 1979-01-30 Matsushita Electric Ind Co Ltd Viscous agnent coating device

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0185209A2 (en) * 1984-12-21 1986-06-25 International Business Machines Corporation Magnetic disk coating method and apparatus
JPS63248471A (en) * 1987-04-03 1988-10-14 Tokyo Electron Ltd Coating device
JPH02123362A (en) * 1988-11-01 1990-05-10 Fujitsu Ltd Method and device for application of resist
US5069156A (en) * 1989-03-22 1991-12-03 Fujitsu Limited Spin coating apparatus for forming a photoresist film over a substrate having a non-circular outer shape
JPH0399431U (en) * 1990-01-30 1991-10-17
US5234499A (en) * 1990-06-26 1993-08-10 Dainippon Screen Mgf. Co., Ltd. Spin coating apparatus
JPH04146615A (en) * 1990-10-08 1992-05-20 Tatsumo Kk Rotating cup type chemical solution treatment device in semiconductor growth process
JPH0568091B2 (en) * 1990-10-08 1993-09-28 Tatsumo Kk
US5908661A (en) * 1997-05-30 1999-06-01 The Fairchild Corporation Apparatus and method for spin coating substrates
US5916631A (en) * 1997-05-30 1999-06-29 The Fairchild Corporation Method and apparatus for spin-coating chemicals

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