JPS6231192Y2 - - Google Patents

Info

Publication number
JPS6231192Y2
JPS6231192Y2 JP1982168674U JP16867482U JPS6231192Y2 JP S6231192 Y2 JPS6231192 Y2 JP S6231192Y2 JP 1982168674 U JP1982168674 U JP 1982168674U JP 16867482 U JP16867482 U JP 16867482U JP S6231192 Y2 JPS6231192 Y2 JP S6231192Y2
Authority
JP
Japan
Prior art keywords
cleaning
cleaning liquid
tank
cleaning tank
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982168674U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5974887U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16867482U priority Critical patent/JPS5974887U/ja
Publication of JPS5974887U publication Critical patent/JPS5974887U/ja
Application granted granted Critical
Publication of JPS6231192Y2 publication Critical patent/JPS6231192Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP16867482U 1982-11-09 1982-11-09 洗浄装置 Granted JPS5974887U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16867482U JPS5974887U (ja) 1982-11-09 1982-11-09 洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16867482U JPS5974887U (ja) 1982-11-09 1982-11-09 洗浄装置

Publications (2)

Publication Number Publication Date
JPS5974887U JPS5974887U (ja) 1984-05-21
JPS6231192Y2 true JPS6231192Y2 (enrdf_load_html_response) 1987-08-10

Family

ID=30368692

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16867482U Granted JPS5974887U (ja) 1982-11-09 1982-11-09 洗浄装置

Country Status (1)

Country Link
JP (1) JPS5974887U (enrdf_load_html_response)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3710450A (en) * 1971-02-01 1973-01-16 Allied Chem Process and apparatus for removing liquids from solid surfaces
JPS5783036A (en) * 1980-11-10 1982-05-24 Seiichiro Sogo Cleaning device for semiconductor material
JPS57160131A (en) * 1981-03-30 1982-10-02 Hitachi Ltd Washing cell

Also Published As

Publication number Publication date
JPS5974887U (ja) 1984-05-21

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