JPS62289222A - 気体吸着捕捉装置 - Google Patents

気体吸着捕捉装置

Info

Publication number
JPS62289222A
JPS62289222A JP61133090A JP13309086A JPS62289222A JP S62289222 A JPS62289222 A JP S62289222A JP 61133090 A JP61133090 A JP 61133090A JP 13309086 A JP13309086 A JP 13309086A JP S62289222 A JPS62289222 A JP S62289222A
Authority
JP
Japan
Prior art keywords
gas
trapping
adsorption
fluorine
gas adsorption
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61133090A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0251654B2 (enrdf_load_stackoverflow
Inventor
Hisayuki Mizuno
水野　久幸
Masao Miura
正男 三浦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ube Corp
Original Assignee
Ube Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ube Industries Ltd filed Critical Ube Industries Ltd
Priority to JP61133090A priority Critical patent/JPS62289222A/ja
Publication of JPS62289222A publication Critical patent/JPS62289222A/ja
Publication of JPH0251654B2 publication Critical patent/JPH0251654B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Treating Waste Gases (AREA)
  • Drying Of Semiconductors (AREA)
JP61133090A 1986-06-09 1986-06-09 気体吸着捕捉装置 Granted JPS62289222A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61133090A JPS62289222A (ja) 1986-06-09 1986-06-09 気体吸着捕捉装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61133090A JPS62289222A (ja) 1986-06-09 1986-06-09 気体吸着捕捉装置

Publications (2)

Publication Number Publication Date
JPS62289222A true JPS62289222A (ja) 1987-12-16
JPH0251654B2 JPH0251654B2 (enrdf_load_stackoverflow) 1990-11-08

Family

ID=15096614

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61133090A Granted JPS62289222A (ja) 1986-06-09 1986-06-09 気体吸着捕捉装置

Country Status (1)

Country Link
JP (1) JPS62289222A (enrdf_load_stackoverflow)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03202128A (ja) * 1989-12-28 1991-09-03 Ebara Res Co Ltd Ｎｆ↓３の除害方法
EP0962248A1 (en) * 1998-06-02 1999-12-08 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Abatement system for CIF3 containing exhaust gases.
JP2003159513A (ja) * 2001-09-13 2003-06-03 Seiko Epson Corp 有機ハロゲン化合物ガスの除害方法、有機ハロゲン化合物ガスの除害装置、半導体装置の製造システム及び半導体装置の製造方法
US6945925B2 (en) 2003-07-31 2005-09-20 Joel Pooler Biosequestration and organic assimilation of greenhouse gases
JP2009268962A (ja) * 2008-05-07 2009-11-19 Japan Pionics Co Ltd フッ素化合物の分解処理システム
JP2010158620A (ja) * 2009-01-08 2010-07-22 Ebara Corp フッ素化合物を含有する排ガスの処理方法及び処理用反応槽
US20140260989A1 (en) * 2013-03-14 2014-09-18 Universal Laser Systems, Inc. Multi-stage air filtration systems and associated apparatuses and methods
JP2022169836A (ja) * 2021-04-28 2022-11-10 ＳｙｎｃＭＯＦ株式会社 ガス処理システム、ガス処理方法及び制御装置

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03202128A (ja) * 1989-12-28 1991-09-03 Ebara Res Co Ltd Ｎｆ↓３の除害方法
EP0962248A1 (en) * 1998-06-02 1999-12-08 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Abatement system for CIF3 containing exhaust gases.
JP2003159513A (ja) * 2001-09-13 2003-06-03 Seiko Epson Corp 有機ハロゲン化合物ガスの除害方法、有機ハロゲン化合物ガスの除害装置、半導体装置の製造システム及び半導体装置の製造方法
US6945925B2 (en) 2003-07-31 2005-09-20 Joel Pooler Biosequestration and organic assimilation of greenhouse gases
JP2009268962A (ja) * 2008-05-07 2009-11-19 Japan Pionics Co Ltd フッ素化合物の分解処理システム
JP2010158620A (ja) * 2009-01-08 2010-07-22 Ebara Corp フッ素化合物を含有する排ガスの処理方法及び処理用反応槽
US20140260989A1 (en) * 2013-03-14 2014-09-18 Universal Laser Systems, Inc. Multi-stage air filtration systems and associated apparatuses and methods
US9155988B2 (en) * 2013-03-14 2015-10-13 Universal Laser Systems, Inc. Multi-stage air filtration systems and associated apparatuses and methods
JP2022169836A (ja) * 2021-04-28 2022-11-10 ＳｙｎｃＭＯＦ株式会社 ガス処理システム、ガス処理方法及び制御装置

Also Published As

Publication number Publication date
JPH0251654B2 (enrdf_load_stackoverflow) 1990-11-08

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