JPH0251654B2 - - Google Patents

Info

Publication number
JPH0251654B2
JPH0251654B2 JP61133090A JP13309086A JPH0251654B2 JP H0251654 B2 JPH0251654 B2 JP H0251654B2 JP 61133090 A JP61133090 A JP 61133090A JP 13309086 A JP13309086 A JP 13309086A JP H0251654 B2 JPH0251654 B2 JP H0251654B2
Authority
JP
Japan
Prior art keywords
gas
trapping
fluorine
section
dry etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61133090A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62289222A (ja
Inventor
Hisayuki Mizuno
Masao Miura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ube Corp
Original Assignee
Ube Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ube Industries Ltd filed Critical Ube Industries Ltd
Priority to JP61133090A priority Critical patent/JPS62289222A/ja
Publication of JPS62289222A publication Critical patent/JPS62289222A/ja
Publication of JPH0251654B2 publication Critical patent/JPH0251654B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Treating Waste Gases (AREA)
JP61133090A 1986-06-09 1986-06-09 気体吸着捕捉装置 Granted JPS62289222A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61133090A JPS62289222A (ja) 1986-06-09 1986-06-09 気体吸着捕捉装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61133090A JPS62289222A (ja) 1986-06-09 1986-06-09 気体吸着捕捉装置

Publications (2)

Publication Number Publication Date
JPS62289222A JPS62289222A (ja) 1987-12-16
JPH0251654B2 true JPH0251654B2 (enrdf_load_stackoverflow) 1990-11-08

Family

ID=15096614

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61133090A Granted JPS62289222A (ja) 1986-06-09 1986-06-09 気体吸着捕捉装置

Country Status (1)

Country Link
JP (1) JPS62289222A (enrdf_load_stackoverflow)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03202128A (ja) * 1989-12-28 1991-09-03 Ebara Res Co Ltd Ｎｆ↓３の除害方法
US6060034A (en) * 1998-06-02 2000-05-09 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Abatement system for ClF3 containing exhaust gases
JP2003159513A (ja) * 2001-09-13 2003-06-03 Seiko Epson Corp 有機ハロゲン化合物ガスの除害方法、有機ハロゲン化合物ガスの除害装置、半導体装置の製造システム及び半導体装置の製造方法
US6945925B2 (en) 2003-07-31 2005-09-20 Joel Pooler Biosequestration and organic assimilation of greenhouse gases
JP4887327B2 (ja) * 2008-05-07 2012-02-29 日本パイオニクス株式会社 フッ素化合物の分解処理システム
JP5016616B2 (ja) * 2009-01-08 2012-09-05 株式会社荏原製作所 フッ素化合物を含有する排ガスの処理方法及び処理用反応槽
US9155988B2 (en) * 2013-03-14 2015-10-13 Universal Laser Systems, Inc. Multi-stage air filtration systems and associated apparatuses and methods
JP7050371B1 (ja) * 2021-04-28 2022-04-08 ＳｙｎｃＭＯＦ株式会社 ガス処理システム、ガス処理方法及び制御装置

Also Published As

Publication number Publication date
JPS62289222A (ja) 1987-12-16

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Legal Events

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