JPH0436727B2 - - Google Patents

Info

Publication number
JPH0436727B2
JPH0436727B2 JP62126701A JP12670187A JPH0436727B2 JP H0436727 B2 JPH0436727 B2 JP H0436727B2 JP 62126701 A JP62126701 A JP 62126701A JP 12670187 A JP12670187 A JP 12670187A JP H0436727 B2 JPH0436727 B2 JP H0436727B2
Authority
JP
Japan
Prior art keywords
dry etching
pump
exhaust gas
vacuum pump
adsorbent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62126701A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63291624A (ja
Inventor
Kunio Kashiwada
Toshiharu Hasumoto
Minoru Konishi
Katsuzo Ukai
Tsutomu Tsukada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Holdings Corp
Original Assignee
Showa Denko KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Denko KK filed Critical Showa Denko KK
Priority to JP62126701A priority Critical patent/JPS63291624A/ja
Publication of JPS63291624A publication Critical patent/JPS63291624A/ja
Publication of JPH0436727B2 publication Critical patent/JPH0436727B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Treating Waste Gases (AREA)
  • Drying Of Semiconductors (AREA)
JP62126701A 1987-05-23 1987-05-23 ガリウム・ヒ素ウェハ−のドライエッチング排ガスの処理方法 Granted JPS63291624A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62126701A JPS63291624A (ja) 1987-05-23 1987-05-23 ガリウム・ヒ素ウェハ−のドライエッチング排ガスの処理方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62126701A JPS63291624A (ja) 1987-05-23 1987-05-23 ガリウム・ヒ素ウェハ−のドライエッチング排ガスの処理方法

Publications (2)

Publication Number Publication Date
JPS63291624A JPS63291624A (ja) 1988-11-29
JPH0436727B2 true JPH0436727B2 (enrdf_load_stackoverflow) 1992-06-17

Family

ID=14941707

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62126701A Granted JPS63291624A (ja) 1987-05-23 1987-05-23 ガリウム・ヒ素ウェハ−のドライエッチング排ガスの処理方法

Country Status (1)

Country Link
JP (1) JPS63291624A (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0715131Y2 (ja) * 1989-01-20 1995-04-10 古河電気工業株式会社 有機金属気相成長装置
JPH0647233A (ja) * 1992-06-09 1994-02-22 Ebara Infilco Co Ltd ハロゲン系排ガスの処理方法
JP4558176B2 (ja) * 2000-11-17 2010-10-06 三菱電機株式会社 ハロゲン含有ガス処理方法及び処理装置
JP2006253517A (ja) * 2005-03-14 2006-09-21 Dainippon Screen Mfg Co Ltd 減圧乾燥装置
JP2013086088A (ja) * 2011-10-24 2013-05-13 Taiyo Nippon Sanso Corp ハロゲン化物粒子を含むガスの除害方法
KR101514801B1 (ko) * 2013-06-25 2015-04-24 (주)파인텍 과불화화합물의 분리 및 재활용시스템

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59109227A (ja) * 1982-12-14 1984-06-23 Showa Denko Kk ドライエツチング排ガスの処理方法
JPS60198394A (ja) * 1984-03-21 1985-10-07 Anelva Corp 真空処理装置の排気装置
JPS6161016U (enrdf_load_stackoverflow) * 1984-09-27 1986-04-24
JPH0339198A (ja) * 1989-07-05 1991-02-20 Matsushita Electric Ind Co Ltd 誘導加熱式アイロン

Also Published As

Publication number Publication date
JPS63291624A (ja) 1988-11-29

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