JPS6116492B2 - - Google Patents
Info
- Publication number
- JPS6116492B2 JPS6116492B2 JP58151076A JP15107683A JPS6116492B2 JP S6116492 B2 JPS6116492 B2 JP S6116492B2 JP 58151076 A JP58151076 A JP 58151076A JP 15107683 A JP15107683 A JP 15107683A JP S6116492 B2 JPS6116492 B2 JP S6116492B2
- Authority
- JP
- Japan
- Prior art keywords
- dry etching
- gas
- pump
- rotary pump
- exhaust system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001312 dry etching Methods 0.000 claims description 25
- 238000000034 method Methods 0.000 claims description 17
- 239000003463 adsorbent Substances 0.000 claims description 5
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 claims description 4
- 239000007789 gas Substances 0.000 description 19
- 238000001179 sorption measurement Methods 0.000 description 8
- 238000005530 etching Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 239000003517 fume Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 239000002808 molecular sieve Substances 0.000 description 2
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 235000013162 Cocos nucifera Nutrition 0.000 description 1
- 244000060011 Cocos nucifera Species 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 229910021536 Zeolite Inorganic materials 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 150000001721 carbon Chemical class 0.000 description 1
- 239000003610 charcoal Substances 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 1
- 239000010903 husk Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
- 239000010457 zeolite Substances 0.000 description 1
Landscapes
- Treating Waste Gases (AREA)
- Separation Of Gases By Adsorption (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58151076A JPS6044025A (ja) | 1983-08-19 | 1983-08-19 | ドライエッチング排ガスの処理方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58151076A JPS6044025A (ja) | 1983-08-19 | 1983-08-19 | ドライエッチング排ガスの処理方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6044025A JPS6044025A (ja) | 1985-03-08 |
| JPS6116492B2 true JPS6116492B2 (enrdf_load_stackoverflow) | 1986-04-30 |
Family
ID=15510783
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58151076A Granted JPS6044025A (ja) | 1983-08-19 | 1983-08-19 | ドライエッチング排ガスの処理方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6044025A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101514801B1 (ko) * | 2013-06-25 | 2015-04-24 | (주)파인텍 | 과불화화합물의 분리 및 재활용시스템 |
| CN109695891A (zh) * | 2018-05-30 | 2019-04-30 | 中电华创(苏州)电力技术研究有限公司 | 一种分仓回转式净化器及烟气净化系统 |
-
1983
- 1983-08-19 JP JP58151076A patent/JPS6044025A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6044025A (ja) | 1985-03-08 |
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