JPS6044025A - ドライエッチング排ガスの処理方法 - Google Patents
ドライエッチング排ガスの処理方法Info
- Publication number
- JPS6044025A JPS6044025A JP58151076A JP15107683A JPS6044025A JP S6044025 A JPS6044025 A JP S6044025A JP 58151076 A JP58151076 A JP 58151076A JP 15107683 A JP15107683 A JP 15107683A JP S6044025 A JPS6044025 A JP S6044025A
- Authority
- JP
- Japan
- Prior art keywords
- dry etching
- pump
- bcl3
- exhaust gas
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001312 dry etching Methods 0.000 title claims abstract description 23
- 238000000034 method Methods 0.000 claims abstract description 18
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 claims abstract description 10
- 239000003463 adsorbent Substances 0.000 claims abstract description 6
- 229910015844 BCl3 Inorganic materials 0.000 abstract description 6
- 238000005530 etching Methods 0.000 abstract description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract description 4
- 238000009792 diffusion process Methods 0.000 abstract description 3
- 229910021536 Zeolite Inorganic materials 0.000 abstract description 2
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 abstract description 2
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 abstract description 2
- 239000010457 zeolite Substances 0.000 abstract description 2
- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 abstract 4
- YPSXFMHXRZAGTG-UHFFFAOYSA-N 4-methoxy-2-[2-(5-methoxy-2-nitrosophenyl)ethyl]-1-nitrosobenzene Chemical compound COC1=CC=C(N=O)C(CCC=2C(=CC=C(OC)C=2)N=O)=C1 YPSXFMHXRZAGTG-UHFFFAOYSA-N 0.000 abstract 1
- 102100021569 Apoptosis regulator Bcl-2 Human genes 0.000 abstract 1
- 101000971171 Homo sapiens Apoptosis regulator Bcl-2 Proteins 0.000 abstract 1
- 238000007599 discharging Methods 0.000 abstract 1
- 230000007062 hydrolysis Effects 0.000 abstract 1
- 238000006460 hydrolysis reaction Methods 0.000 abstract 1
- 238000001020 plasma etching Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 17
- 238000001179 sorption measurement Methods 0.000 description 6
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 150000001721 carbon Chemical class 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 239000003517 fume Substances 0.000 description 2
- 239000002808 molecular sieve Substances 0.000 description 2
- 229920006254 polymer film Polymers 0.000 description 2
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 239000004575 stone Substances 0.000 description 2
- 235000011149 sulphuric acid Nutrition 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 235000013162 Cocos nucifera Nutrition 0.000 description 1
- 244000060011 Cocos nucifera Species 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000003610 charcoal Substances 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 239000010903 husk Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 210000003625 skull Anatomy 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Landscapes
- Treating Waste Gases (AREA)
- Separation Of Gases By Adsorption (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58151076A JPS6044025A (ja) | 1983-08-19 | 1983-08-19 | ドライエッチング排ガスの処理方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58151076A JPS6044025A (ja) | 1983-08-19 | 1983-08-19 | ドライエッチング排ガスの処理方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6044025A true JPS6044025A (ja) | 1985-03-08 |
| JPS6116492B2 JPS6116492B2 (enrdf_load_stackoverflow) | 1986-04-30 |
Family
ID=15510783
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58151076A Granted JPS6044025A (ja) | 1983-08-19 | 1983-08-19 | ドライエッチング排ガスの処理方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6044025A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104619401A (zh) * | 2013-06-25 | 2015-05-13 | 帕恩泰株式会社 | 全氟化合的分离及回收系统 |
| CN109695891A (zh) * | 2018-05-30 | 2019-04-30 | 中电华创(苏州)电力技术研究有限公司 | 一种分仓回转式净化器及烟气净化系统 |
-
1983
- 1983-08-19 JP JP58151076A patent/JPS6044025A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104619401A (zh) * | 2013-06-25 | 2015-05-13 | 帕恩泰株式会社 | 全氟化合的分离及回收系统 |
| CN109695891A (zh) * | 2018-05-30 | 2019-04-30 | 中电华创(苏州)电力技术研究有限公司 | 一种分仓回转式净化器及烟气净化系统 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6116492B2 (enrdf_load_stackoverflow) | 1986-04-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP6570794B2 (ja) | 排ガスの減圧除害装置 | |
| JP3241674U (ja) | 半導体廃ガス処理システムとその水分分離器 | |
| JPH0339198B2 (enrdf_load_stackoverflow) | ||
| CN118663038A (zh) | 一种喷淋式voc尾气处理装置 | |
| JP2001137642A (ja) | 気体ハロゲン化水素から水を除去する方法及び吸着剤 | |
| JPH08172083A (ja) | 副生成物トラップ装置及びその洗浄方法 | |
| JP2004140373A (ja) | 半導体処理チャンバへのフッ素の大気条件よりも低い条件での供給 | |
| JPS6044025A (ja) | ドライエッチング排ガスの処理方法 | |
| JP3156452B2 (ja) | クリーンエアー供給装置と供給方法 | |
| JPH0436727B2 (enrdf_load_stackoverflow) | ||
| CN209076289U (zh) | 一种有机气体颗粒碳净化回收设备 | |
| JP3433998B2 (ja) | 濾過装置及びそれによる真空ポンプ系保護方法 | |
| JP2968301B2 (ja) | ドライエッチング装置 | |
| JP4491696B2 (ja) | 排気ガス処理装置 | |
| JPH0116309B2 (enrdf_load_stackoverflow) | ||
| JP4210395B2 (ja) | ドライエッチング排ガス処理装置 | |
| CN222173550U (zh) | 一种涂料生产线的废气净化装置 | |
| CN221452112U (zh) | 一种含粉末尾气的处理装置 | |
| CN215654469U (zh) | 一种废气净化用多级处理设备 | |
| JP2000354733A (ja) | 排ガスの処理方法およびそれを用いた装置 | |
| CN222871631U (zh) | 一种用于复合油相生产废气过滤设备 | |
| KR0169094B1 (ko) | 오염된 공기의 정화장치 | |
| CN205323444U (zh) | 废气净化装置 | |
| CN218249089U (zh) | 一种甲酸钙生产用尾气处理装置 | |
| CN221713975U (zh) | 一种废气处理装置 |