JPH0554627B2 - - Google Patents

Info

Publication number
JPH0554627B2
JPH0554627B2 JP60165242A JP16524285A JPH0554627B2 JP H0554627 B2 JPH0554627 B2 JP H0554627B2 JP 60165242 A JP60165242 A JP 60165242A JP 16524285 A JP16524285 A JP 16524285A JP H0554627 B2 JPH0554627 B2 JP H0554627B2
Authority
JP
Japan
Prior art keywords
boron trichloride
gas
adsorption
adsorbent
adsorption device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60165242A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6227039A (ja
Inventor
Hisayuki Mizuno
Masao Miura
Hiroyuki Fukushima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ube Corp
Original Assignee
Ube Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ube Industries Ltd filed Critical Ube Industries Ltd
Priority to JP60165242A priority Critical patent/JPS6227039A/ja
Publication of JPS6227039A publication Critical patent/JPS6227039A/ja
Priority to US07/082,932 priority patent/US4820316A/en
Publication of JPH0554627B2 publication Critical patent/JPH0554627B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
  • Treating Waste Gases (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
JP60165242A 1984-09-11 1985-07-26 三塩化ホウ素吸着装置 Granted JPS6227039A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP60165242A JPS6227039A (ja) 1985-07-26 1985-07-26 三塩化ホウ素吸着装置
US07/082,932 US4820316A (en) 1984-09-11 1987-08-05 Method of foreseeing break-through in gas adsorbing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60165242A JPS6227039A (ja) 1985-07-26 1985-07-26 三塩化ホウ素吸着装置

Publications (2)

Publication Number Publication Date
JPS6227039A JPS6227039A (ja) 1987-02-05
JPH0554627B2 true JPH0554627B2 (enrdf_load_stackoverflow) 1993-08-13

Family

ID=15808572

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60165242A Granted JPS6227039A (ja) 1984-09-11 1985-07-26 三塩化ホウ素吸着装置

Country Status (1)

Country Link
JP (1) JPS6227039A (enrdf_load_stackoverflow)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0829999B2 (ja) * 1987-12-19 1996-03-27 富士通株式会社 ダイヤモンド膜の合成方法
DE68928245T2 (de) * 1988-12-27 1997-12-11 Canon Kk Durch elektrisches Feld lichtemittierende Vorrichtung
WO1990015787A1 (en) * 1989-06-15 1990-12-27 Idemitsu Petrochemical Company Limited Diamond-coated member
JPH0382156U (enrdf_load_stackoverflow) * 1989-12-08 1991-08-21
JP2003226512A (ja) * 2001-11-28 2003-08-12 Ueda Shikimono Kojo:Kk 光触媒活性炭、着色光触媒活性炭、呈色活性炭及びこれらを用いた消臭・吸着製品並びに土壌浄化方法
CN109289487B (zh) * 2018-11-02 2021-06-29 辽宁新瑞碳材料科技有限公司 一种高温炉含氯、氩尾气的处理方法
CN109289485B (zh) * 2018-11-02 2021-06-29 辽宁新瑞碳材料科技有限公司 一种含氯高温炉尾气的回收处理方法
CN109289488B (zh) * 2018-11-02 2021-06-29 辽宁新瑞碳材料科技有限公司 一种高温炉含氯、氩尾气的处理系统

Also Published As

Publication number Publication date
JPS6227039A (ja) 1987-02-05

Similar Documents

Publication Publication Date Title
US6783577B2 (en) Gas purifier system containing an ultra-low emission carbon material
US20030082918A1 (en) Harm-removing agent and method for rendering halogen-containing gas harmless and uses thereof
JPH03213144A (ja) 液体炭化水素から水銀を除去するための新規な製品／方法／用途
JPH0554627B2 (enrdf_load_stackoverflow)
JP2001338910A (ja) ハロゲン系ガスの除害剤、除害方法及びその用途
JP2581642B2 (ja) エッチング排ガス除害剤及び排ガス処理方法
EP0625368B1 (en) Process for cleaning harmful gas
WO2001089666A1 (en) Composition and method for rendering halogen-containing gas harmless
JPH0251653B2 (enrdf_load_stackoverflow)
JPS61194360A (ja) 三塩化ホウ素吸着装置の破過検知方法
JPH0251654B2 (enrdf_load_stackoverflow)
JP2001215221A (ja) ハロゲン化合物の検知剤及び検知方法
KR920007856B1 (ko) 기체상태의 산성 할로겐 화합물의 제거방법
JP3264453B2 (ja) Ｎｆ▲３▼ガスの前処理方法
JPH0664041B2 (ja) 三塩化ホウ素の検出剤および三塩化ホウ素吸着装置の破過検知方法
JP2002365273A (ja) 難分解性ハロゲン化合物の含有量の測定方法。
Cook Jr et al. Adsorption of chlorinated methanes from aqueous solution on selected plastic adsorbents
CN220779666U (zh) 一种用于吸收二氧化碳的装置
Puzyrnaya et al. Processes of sorption–desorption in the Cr (Vi)–calcined Zn/Al–hydrotalcite system
JPH0583866B2 (enrdf_load_stackoverflow)
US20070154376A1 (en) Purification of sulfuryl fluoride
JPS6372338A (ja) 有害ガス吸着剤
JP2823101B2 (ja) 排ガス処理装置の塩素ガスによる破過を検知する方法
JP2005185876A (ja) ハロゲン系ガスの処理方法および処理装置
JP2005097542A (ja) 炭化水素含有ガス処理装置および炭化水素含有ガス処理方法