JPS6227039A - 三塩化ホウ素吸着装置 - Google Patents

三塩化ホウ素吸着装置

Info

Publication number
JPS6227039A
JPS6227039A JP60165242A JP16524285A JPS6227039A JP S6227039 A JPS6227039 A JP S6227039A JP 60165242 A JP60165242 A JP 60165242A JP 16524285 A JP16524285 A JP 16524285A JP S6227039 A JPS6227039 A JP S6227039A
Authority
JP
Japan
Prior art keywords
boron trichloride
gas
adsorption
adsorbent
adsorption device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60165242A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0554627B2 (enrdf_load_stackoverflow
Inventor
Hisayuki Mizuno
水野　久幸
Masao Miura
正男 三浦
Hiroyuki Fukushima
福嶋　博之
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ube Corp
Original Assignee
Ube Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ube Industries Ltd filed Critical Ube Industries Ltd
Priority to JP60165242A priority Critical patent/JPS6227039A/ja
Publication of JPS6227039A publication Critical patent/JPS6227039A/ja
Priority to US07/082,932 priority patent/US4820316A/en
Publication of JPH0554627B2 publication Critical patent/JPH0554627B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
  • Treating Waste Gases (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
JP60165242A 1984-09-11 1985-07-26 三塩化ホウ素吸着装置 Granted JPS6227039A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP60165242A JPS6227039A (ja) 1985-07-26 1985-07-26 三塩化ホウ素吸着装置
US07/082,932 US4820316A (en) 1984-09-11 1987-08-05 Method of foreseeing break-through in gas adsorbing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60165242A JPS6227039A (ja) 1985-07-26 1985-07-26 三塩化ホウ素吸着装置

Publications (2)

Publication Number Publication Date
JPS6227039A true JPS6227039A (ja) 1987-02-05
JPH0554627B2 JPH0554627B2 (enrdf_load_stackoverflow) 1993-08-13

Family

ID=15808572

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60165242A Granted JPS6227039A (ja) 1984-09-11 1985-07-26 三塩化ホウ素吸着装置

Country Status (1)

Country Link
JP (1) JPS6227039A (enrdf_load_stackoverflow)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01164797A (ja) * 1987-12-19 1989-06-28 Fujitsu Ltd ダイヤモンド膜の合成方法
JPH0382156U (enrdf_load_stackoverflow) * 1989-12-08 1991-08-21
US5210430A (en) * 1988-12-27 1993-05-11 Canon Kabushiki Kaisha Electric field light-emitting device
US5318836A (en) * 1989-06-15 1994-06-07 Ngk Spark Plug Company Limited Diamond-coated body
JP2003226512A (ja) * 2001-11-28 2003-08-12 Ueda Shikimono Kojo:Kk 光触媒活性炭、着色光触媒活性炭、呈色活性炭及びこれらを用いた消臭・吸着製品並びに土壌浄化方法
CN109289487A (zh) * 2018-11-02 2019-02-01 辽宁新瑞碳材料科技有限公司 一种高温炉含氯、氩尾气的处理方法
CN109289488A (zh) * 2018-11-02 2019-02-01 辽宁新瑞碳材料科技有限公司 一种高温炉含氯、氩尾气的处理系统
CN109289485A (zh) * 2018-11-02 2019-02-01 辽宁新瑞碳材料科技有限公司 一种含氯高温炉尾气的回收处理方法

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01164797A (ja) * 1987-12-19 1989-06-28 Fujitsu Ltd ダイヤモンド膜の合成方法
US5210430A (en) * 1988-12-27 1993-05-11 Canon Kabushiki Kaisha Electric field light-emitting device
US5275967A (en) * 1988-12-27 1994-01-04 Canon Kabushiki Kaisha Electric field light-emitting device
US5318836A (en) * 1989-06-15 1994-06-07 Ngk Spark Plug Company Limited Diamond-coated body
JPH0382156U (enrdf_load_stackoverflow) * 1989-12-08 1991-08-21
JP2003226512A (ja) * 2001-11-28 2003-08-12 Ueda Shikimono Kojo:Kk 光触媒活性炭、着色光触媒活性炭、呈色活性炭及びこれらを用いた消臭・吸着製品並びに土壌浄化方法
CN109289487A (zh) * 2018-11-02 2019-02-01 辽宁新瑞碳材料科技有限公司 一种高温炉含氯、氩尾气的处理方法
CN109289488A (zh) * 2018-11-02 2019-02-01 辽宁新瑞碳材料科技有限公司 一种高温炉含氯、氩尾气的处理系统
CN109289485A (zh) * 2018-11-02 2019-02-01 辽宁新瑞碳材料科技有限公司 一种含氯高温炉尾气的回收处理方法
CN109289488B (zh) * 2018-11-02 2021-06-29 辽宁新瑞碳材料科技有限公司 一种高温炉含氯、氩尾气的处理系统
CN109289485B (zh) * 2018-11-02 2021-06-29 辽宁新瑞碳材料科技有限公司 一种含氯高温炉尾气的回收处理方法
CN109289487B (zh) * 2018-11-02 2021-06-29 辽宁新瑞碳材料科技有限公司 一种高温炉含氯、氩尾气的处理方法

Also Published As

Publication number Publication date
JPH0554627B2 (enrdf_load_stackoverflow) 1993-08-13

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