JPS6227446B2 - - Google Patents
Info
- Publication number
- JPS6227446B2 JPS6227446B2 JP10194679A JP10194679A JPS6227446B2 JP S6227446 B2 JPS6227446 B2 JP S6227446B2 JP 10194679 A JP10194679 A JP 10194679A JP 10194679 A JP10194679 A JP 10194679A JP S6227446 B2 JPS6227446 B2 JP S6227446B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic head
- thin film
- pole height
- film magnetic
- comb
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010409 thin film Substances 0.000 claims description 31
- 238000005498 polishing Methods 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 11
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 8
- 239000010408 film Substances 0.000 claims description 3
- 244000126211 Hericium coralloides Species 0.000 claims description 2
- 238000005259 measurement Methods 0.000 description 6
- 239000004020 conductor Substances 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 210000001520 comb Anatomy 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000000053 physical method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
- G11B5/3166—Testing or indicating in relation thereto, e.g. before the fabrication is completed
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10194679A JPS5629832A (en) | 1979-08-10 | 1979-08-10 | Manufacture for thin film magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10194679A JPS5629832A (en) | 1979-08-10 | 1979-08-10 | Manufacture for thin film magnetic head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5629832A JPS5629832A (en) | 1981-03-25 |
| JPS6227446B2 true JPS6227446B2 (enrdf_load_stackoverflow) | 1987-06-15 |
Family
ID=14314055
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10194679A Granted JPS5629832A (en) | 1979-08-10 | 1979-08-10 | Manufacture for thin film magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5629832A (enrdf_load_stackoverflow) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57162115A (en) * | 1981-03-30 | 1982-10-05 | Nec Corp | Thin-film magnetic head element |
| JPS59223919A (ja) * | 1983-06-03 | 1984-12-15 | Sanyo Electric Co Ltd | 薄膜磁気ヘツドの製造方法 |
| JPH0664714B2 (ja) * | 1983-11-25 | 1994-08-22 | 株式会社東芝 | 薄膜磁気ヘッド |
| JPS60135813U (ja) * | 1984-02-17 | 1985-09-09 | 株式会社ケンウッド | 薄膜磁気ヘツド |
| JPS60191417A (ja) * | 1984-03-12 | 1985-09-28 | Nec Kansai Ltd | 薄膜磁気ヘツドの製造方法 |
| JPH0658730B2 (ja) * | 1985-03-26 | 1994-08-03 | 日本ビクター株式会社 | 薄膜磁気ヘッド用素体及び薄膜磁気ヘッドの製造方法 |
| US7336442B2 (en) * | 2005-08-22 | 2008-02-26 | Headway Technologies, Inc. | Magnetic head and method of manufacturing same, and magnetic head substructure |
-
1979
- 1979-08-10 JP JP10194679A patent/JPS5629832A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5629832A (en) | 1981-03-25 |
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