JPS6227155B2 - - Google Patents
Info
- Publication number
- JPS6227155B2 JPS6227155B2 JP54109125A JP10912579A JPS6227155B2 JP S6227155 B2 JPS6227155 B2 JP S6227155B2 JP 54109125 A JP54109125 A JP 54109125A JP 10912579 A JP10912579 A JP 10912579A JP S6227155 B2 JPS6227155 B2 JP S6227155B2
- Authority
- JP
- Japan
- Prior art keywords
- wiring
- film
- photoresist
- dry etching
- aluminum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001312 dry etching Methods 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 11
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 9
- 229910052782 aluminium Inorganic materials 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 9
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 8
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 7
- 238000005530 etching Methods 0.000 claims description 6
- 229920002120 photoresistant polymer Polymers 0.000 description 15
- 239000010410 layer Substances 0.000 description 6
- 239000000758 substrate Substances 0.000 description 4
- 239000011229 interlayer Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000005368 silicate glass Substances 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10912579A JPS5635774A (en) | 1979-08-29 | 1979-08-29 | Dry etching method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10912579A JPS5635774A (en) | 1979-08-29 | 1979-08-29 | Dry etching method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5635774A JPS5635774A (en) | 1981-04-08 |
| JPS6227155B2 true JPS6227155B2 (ko) | 1987-06-12 |
Family
ID=14502188
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10912579A Granted JPS5635774A (en) | 1979-08-29 | 1979-08-29 | Dry etching method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5635774A (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0522899A (ja) * | 1991-07-10 | 1993-01-29 | Akiko Uchiumi | 自動車のタイヤの回転により電気を作る方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5432143A (en) * | 1977-08-17 | 1979-03-09 | Hitachi Ltd | Etching process |
-
1979
- 1979-08-29 JP JP10912579A patent/JPS5635774A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5432143A (en) * | 1977-08-17 | 1979-03-09 | Hitachi Ltd | Etching process |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0522899A (ja) * | 1991-07-10 | 1993-01-29 | Akiko Uchiumi | 自動車のタイヤの回転により電気を作る方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5635774A (en) | 1981-04-08 |
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