JPS62264128A - ウエハ真空処理装置 - Google Patents

ウエハ真空処理装置

Info

Publication number
JPS62264128A
JPS62264128A JP10648786A JP10648786A JPS62264128A JP S62264128 A JPS62264128 A JP S62264128A JP 10648786 A JP10648786 A JP 10648786A JP 10648786 A JP10648786 A JP 10648786A JP S62264128 A JPS62264128 A JP S62264128A
Authority
JP
Japan
Prior art keywords
wafer
holding section
disposed
vacuum
bobbin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10648786A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0479932B2 (https=
Inventor
Yoshiaki Yanagi
良明 柳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP10648786A priority Critical patent/JPS62264128A/ja
Priority to US06/911,362 priority patent/US4733632A/en
Publication of JPS62264128A publication Critical patent/JPS62264128A/ja
Publication of JPH0479932B2 publication Critical patent/JPH0479932B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
  • Non-Mechanical Conveyors (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)
JP10648786A 1985-09-25 1986-05-09 ウエハ真空処理装置 Granted JPS62264128A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP10648786A JPS62264128A (ja) 1986-05-09 1986-05-09 ウエハ真空処理装置
US06/911,362 US4733632A (en) 1985-09-25 1986-09-25 Wafer feeding apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10648786A JPS62264128A (ja) 1986-05-09 1986-05-09 ウエハ真空処理装置

Publications (2)

Publication Number Publication Date
JPS62264128A true JPS62264128A (ja) 1987-11-17
JPH0479932B2 JPH0479932B2 (https=) 1992-12-17

Family

ID=14434820

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10648786A Granted JPS62264128A (ja) 1985-09-25 1986-05-09 ウエハ真空処理装置

Country Status (1)

Country Link
JP (1) JPS62264128A (https=)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01227453A (ja) * 1988-03-08 1989-09-11 Fujitsu Ltd ウエーハ搬送具
JPH01307537A (ja) * 1988-06-06 1989-12-12 Takenaka Komuten Co Ltd 制振支持構造
JPH02152820A (ja) * 1988-12-01 1990-06-12 Tel Sagami Ltd 熱処理装置
JP2008141898A (ja) * 2006-12-05 2008-06-19 Duplo Seiko Corp アクチュエータおよび搬送装置
JP2009290991A (ja) * 2008-05-29 2009-12-10 Iai:Kk ボイスコイルモータとアクチュエータ
US7866058B2 (en) * 2006-08-30 2011-01-11 Semes Co., Ltd. Spin head and substrate treating method using the same

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56171590U (https=) * 1980-05-21 1981-12-18
JPS5771260A (en) * 1980-10-17 1982-05-04 Mitsubishi Electric Corp Actuator
JPS584389U (ja) * 1981-06-30 1983-01-12 富士通株式会社 ハンド

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56171590U (https=) * 1980-05-21 1981-12-18
JPS5771260A (en) * 1980-10-17 1982-05-04 Mitsubishi Electric Corp Actuator
JPS584389U (ja) * 1981-06-30 1983-01-12 富士通株式会社 ハンド

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01227453A (ja) * 1988-03-08 1989-09-11 Fujitsu Ltd ウエーハ搬送具
JPH01307537A (ja) * 1988-06-06 1989-12-12 Takenaka Komuten Co Ltd 制振支持構造
JPH02152820A (ja) * 1988-12-01 1990-06-12 Tel Sagami Ltd 熱処理装置
US7866058B2 (en) * 2006-08-30 2011-01-11 Semes Co., Ltd. Spin head and substrate treating method using the same
JP2008141898A (ja) * 2006-12-05 2008-06-19 Duplo Seiko Corp アクチュエータおよび搬送装置
JP2009290991A (ja) * 2008-05-29 2009-12-10 Iai:Kk ボイスコイルモータとアクチュエータ

Also Published As

Publication number Publication date
JPH0479932B2 (https=) 1992-12-17

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