JPS62259742A - 基板加工機用のワ−クガイド駆動装置 - Google Patents

基板加工機用のワ−クガイド駆動装置

Info

Publication number
JPS62259742A
JPS62259742A JP61099380A JP9938086A JPS62259742A JP S62259742 A JPS62259742 A JP S62259742A JP 61099380 A JP61099380 A JP 61099380A JP 9938086 A JP9938086 A JP 9938086A JP S62259742 A JPS62259742 A JP S62259742A
Authority
JP
Japan
Prior art keywords
bracket
piston rod
receiving groove
notch
work guide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61099380A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0314578B2 (enExample
Inventor
Akira Irie
入江　明
Yasuhiko Kanetani
保彦 金谷
Masahiro Kawamura
川村　正弘
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Via Mechanics Ltd
Original Assignee
Hitachi Seiko Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Seiko Ltd filed Critical Hitachi Seiko Ltd
Priority to JP61099380A priority Critical patent/JPS62259742A/ja
Publication of JPS62259742A publication Critical patent/JPS62259742A/ja
Publication of JPH0314578B2 publication Critical patent/JPH0314578B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Feeding Of Workpieces (AREA)
  • Supply And Installment Of Electrical Components (AREA)
JP61099380A 1986-05-01 1986-05-01 基板加工機用のワ−クガイド駆動装置 Granted JPS62259742A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61099380A JPS62259742A (ja) 1986-05-01 1986-05-01 基板加工機用のワ−クガイド駆動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61099380A JPS62259742A (ja) 1986-05-01 1986-05-01 基板加工機用のワ−クガイド駆動装置

Publications (2)

Publication Number Publication Date
JPS62259742A true JPS62259742A (ja) 1987-11-12
JPH0314578B2 JPH0314578B2 (enExample) 1991-02-27

Family

ID=14245914

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61099380A Granted JPS62259742A (ja) 1986-05-01 1986-05-01 基板加工機用のワ−クガイド駆動装置

Country Status (1)

Country Link
JP (1) JPS62259742A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02198739A (ja) * 1989-01-24 1990-08-07 Ikeda Koki Kk 材料等の反転装置
WO1993003886A1 (fr) * 1991-08-16 1993-03-04 Hitachi Seiko, Ltd. Installation pour traiter des cartes de circuits imprimes
JP2009083028A (ja) * 2007-09-28 2009-04-23 Jatco Ltd ワーク反転装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2008015759A1 (ja) 2006-08-04 2009-12-17 日立化成工業株式会社 フィルム状接着剤、接着シート及びこれを使用した半導体装置
KR20110034038A (ko) 2008-08-04 2011-04-04 히다치 가세고교 가부시끼가이샤 접착제 조성물, 필름형 접착제, 접착 시트 및 반도체 장치

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02198739A (ja) * 1989-01-24 1990-08-07 Ikeda Koki Kk 材料等の反転装置
WO1993003886A1 (fr) * 1991-08-16 1993-03-04 Hitachi Seiko, Ltd. Installation pour traiter des cartes de circuits imprimes
JP2009083028A (ja) * 2007-09-28 2009-04-23 Jatco Ltd ワーク反転装置

Also Published As

Publication number Publication date
JPH0314578B2 (enExample) 1991-02-27

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Legal Events

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