JPS6225418A - 半導体製造装置 - Google Patents

半導体製造装置

Info

Publication number
JPS6225418A
JPS6225418A JP60164799A JP16479985A JPS6225418A JP S6225418 A JPS6225418 A JP S6225418A JP 60164799 A JP60164799 A JP 60164799A JP 16479985 A JP16479985 A JP 16479985A JP S6225418 A JPS6225418 A JP S6225418A
Authority
JP
Japan
Prior art keywords
commands
command
group
input
semiconductor manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60164799A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0535566B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Ryuichi Sato
隆一 佐藤
Masanori Numata
沼田　正徳
Fumiyoshi Hamazaki
浜崎　文栄
Naoki Ayada
綾田　直樹
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP60164799A priority Critical patent/JPS6225418A/ja
Publication of JPS6225418A publication Critical patent/JPS6225418A/ja
Priority to US07/752,986 priority patent/US5197118A/en
Publication of JPH0535566B2 publication Critical patent/JPH0535566B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing And Monitoring For Control Systems (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP60164799A 1985-07-25 1985-07-25 半導体製造装置 Granted JPS6225418A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP60164799A JPS6225418A (ja) 1985-07-25 1985-07-25 半導体製造装置
US07/752,986 US5197118A (en) 1985-07-25 1991-09-03 Control system for a fine pattern printing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60164799A JPS6225418A (ja) 1985-07-25 1985-07-25 半導体製造装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP6107400A Division JP2614188B2 (ja) 1994-04-25 1994-04-25 コマンド管理方法

Publications (2)

Publication Number Publication Date
JPS6225418A true JPS6225418A (ja) 1987-02-03
JPH0535566B2 JPH0535566B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-05-26

Family

ID=15800152

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60164799A Granted JPS6225418A (ja) 1985-07-25 1985-07-25 半導体製造装置

Country Status (1)

Country Link
JP (1) JPS6225418A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0273616A (ja) * 1988-09-09 1990-03-13 Canon Inc 露光装置の制御方法
JPH02111801U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1989-02-23 1990-09-06
DE102015007831A1 (de) 2015-06-18 2016-12-22 Michael Klemt Schaltungsanordnung zur Galvanisch isolierten Ansteuerung eines ladungsgesteuerten Leistungsschalters

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5549713A (en) * 1978-10-02 1980-04-10 Nec Corp Automatic work processing system
JPS6084605A (ja) * 1983-07-25 1985-05-14 ラ　テレメカニク　エレクトリク プログラマブルコントローラ用プログラムを作成するプログラミング端末装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5549713A (en) * 1978-10-02 1980-04-10 Nec Corp Automatic work processing system
JPS6084605A (ja) * 1983-07-25 1985-05-14 ラ　テレメカニク　エレクトリク プログラマブルコントローラ用プログラムを作成するプログラミング端末装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0273616A (ja) * 1988-09-09 1990-03-13 Canon Inc 露光装置の制御方法
JPH02111801U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1989-02-23 1990-09-06
DE102015007831A1 (de) 2015-06-18 2016-12-22 Michael Klemt Schaltungsanordnung zur Galvanisch isolierten Ansteuerung eines ladungsgesteuerten Leistungsschalters

Also Published As

Publication number Publication date
JPH0535566B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-05-26

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term