JPS62247073A - 巻取式真空装置 - Google Patents
巻取式真空装置Info
- Publication number
- JPS62247073A JPS62247073A JP9014886A JP9014886A JPS62247073A JP S62247073 A JPS62247073 A JP S62247073A JP 9014886 A JP9014886 A JP 9014886A JP 9014886 A JP9014886 A JP 9014886A JP S62247073 A JPS62247073 A JP S62247073A
- Authority
- JP
- Japan
- Prior art keywords
- roller
- film
- sub
- cooling
- cooling roller
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004804 winding Methods 0.000 title claims abstract description 24
- 238000001816 cooling Methods 0.000 claims abstract description 51
- 238000004544 sputter deposition Methods 0.000 claims abstract description 5
- 238000001704 evaporation Methods 0.000 claims description 5
- 230000008020 evaporation Effects 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 abstract description 9
- 238000000576 coating method Methods 0.000 abstract description 9
- 230000037303 wrinkles Effects 0.000 abstract description 5
- 230000003247 decreasing effect Effects 0.000 abstract description 2
- 239000000853 adhesive Substances 0.000 abstract 3
- 230000001070 adhesive effect Effects 0.000 abstract 3
- 239000000843 powder Substances 0.000 abstract 3
- 230000000694 effects Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 238000001771 vacuum deposition Methods 0.000 description 3
- 238000007738 vacuum evaporation Methods 0.000 description 3
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Advancing Webs (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9014886A JPS62247073A (ja) | 1986-04-21 | 1986-04-21 | 巻取式真空装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9014886A JPS62247073A (ja) | 1986-04-21 | 1986-04-21 | 巻取式真空装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62247073A true JPS62247073A (ja) | 1987-10-28 |
| JPH0251982B2 JPH0251982B2 (enrdf_load_stackoverflow) | 1990-11-09 |
Family
ID=13990414
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9014886A Granted JPS62247073A (ja) | 1986-04-21 | 1986-04-21 | 巻取式真空装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62247073A (enrdf_load_stackoverflow) |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011094221A (ja) * | 2009-11-02 | 2011-05-12 | Sumitomo Metal Mining Co Ltd | 長尺耐熱性樹脂フィルムの成膜方法と金属膜付耐熱性樹脂フィルムの製造装置 |
| US7946247B2 (en) | 2006-05-10 | 2011-05-24 | Sumitomo Electric Industries, Ltd. | Coating layer thickness measurement mechanism and coating layer forming apparatus using the same |
| CN102751043A (zh) * | 2011-04-20 | 2012-10-24 | 日东电工株式会社 | 导电性层叠薄膜的制造方法 |
| JP2013049876A (ja) * | 2011-08-30 | 2013-03-14 | Sumitomo Metal Mining Co Ltd | 長尺ガラスフィルムの処理方法および処理装置 |
| JP2013224470A (ja) * | 2012-04-23 | 2013-10-31 | Sumitomo Metal Mining Co Ltd | 長尺体の表面処理装置と表面処理方法および銅張積層樹脂フィルム基板の製造方法 |
| JP2014148724A (ja) * | 2013-02-01 | 2014-08-21 | Toray Eng Co Ltd | 薄膜形成装置 |
| JP2017081679A (ja) * | 2015-10-27 | 2017-05-18 | 住友金属鉱山株式会社 | 長尺基板の巻取方法及び巻取装置、並びに該巻取装置を備えた長尺基板の表面処理装置 |
| EP3287543A1 (en) | 2016-08-23 | 2018-02-28 | Sumitomo Metal Mining Co., Ltd. | Roll-to-roll type treatment apparatus for long base material and deposition apparatus using the same |
| KR20190041506A (ko) | 2016-08-23 | 2019-04-22 | 스미토모 긴조쿠 고잔 가부시키가이샤 | 롤 투 롤 방식의 표면 처리 장치 그리고 이것을 사용한 성막 방법 및 성막 장치 |
| WO2019078014A1 (ja) | 2017-10-19 | 2019-04-25 | 住友金属鉱山株式会社 | キャンロールと長尺基板処理装置および長尺基板処理装置の管理方法 |
| EP3495534A1 (en) | 2017-12-11 | 2019-06-12 | Sumitomo Metal Mining Co., Ltd. | Long substrate treatment apparatus and treatment method |
| WO2019225057A1 (ja) | 2018-05-23 | 2019-11-28 | 住友金属鉱山株式会社 | ガス放出ロール及びその製造方法並びにガス放出ロールを用いた処理装置 |
| KR20200072477A (ko) | 2017-10-17 | 2020-06-22 | 스미토모 긴조쿠 고잔 가부시키가이샤 | 캔 롤과 장척 기판 처리 장치 |
| KR20200074859A (ko) | 2018-12-17 | 2020-06-25 | 닛토덴코 가부시키가이샤 | 도전성 필름 및 도전성 필름의 제조 방법 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61278032A (ja) * | 1985-05-31 | 1986-12-08 | Hitachi Maxell Ltd | 磁気記録媒体の製造方法およびその装置 |
-
1986
- 1986-04-21 JP JP9014886A patent/JPS62247073A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61278032A (ja) * | 1985-05-31 | 1986-12-08 | Hitachi Maxell Ltd | 磁気記録媒体の製造方法およびその装置 |
Cited By (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7946247B2 (en) | 2006-05-10 | 2011-05-24 | Sumitomo Electric Industries, Ltd. | Coating layer thickness measurement mechanism and coating layer forming apparatus using the same |
| JP2011094221A (ja) * | 2009-11-02 | 2011-05-12 | Sumitomo Metal Mining Co Ltd | 長尺耐熱性樹脂フィルムの成膜方法と金属膜付耐熱性樹脂フィルムの製造装置 |
| CN102751043A (zh) * | 2011-04-20 | 2012-10-24 | 日东电工株式会社 | 导电性层叠薄膜的制造方法 |
| US20120269960A1 (en) * | 2011-04-20 | 2012-10-25 | Nitto Denko Corporation | Method of manufacturing conductive laminated film |
| TWI480898B (zh) * | 2011-04-20 | 2015-04-11 | Nitto Denko Corp | Production method of conductive laminated film |
| JP2013049876A (ja) * | 2011-08-30 | 2013-03-14 | Sumitomo Metal Mining Co Ltd | 長尺ガラスフィルムの処理方法および処理装置 |
| JP2013224470A (ja) * | 2012-04-23 | 2013-10-31 | Sumitomo Metal Mining Co Ltd | 長尺体の表面処理装置と表面処理方法および銅張積層樹脂フィルム基板の製造方法 |
| JP2014148724A (ja) * | 2013-02-01 | 2014-08-21 | Toray Eng Co Ltd | 薄膜形成装置 |
| KR20180070572A (ko) | 2015-10-27 | 2018-06-26 | 스미토모 긴조쿠 고잔 가부시키가이샤 | 장척 기판의 권취 방법 및 권취 장치, 그리고 해당 권취 장치를 구비한 장척 기판의 표면 처리 장치 |
| JP2017081679A (ja) * | 2015-10-27 | 2017-05-18 | 住友金属鉱山株式会社 | 長尺基板の巻取方法及び巻取装置、並びに該巻取装置を備えた長尺基板の表面処理装置 |
| EP3287543A1 (en) | 2016-08-23 | 2018-02-28 | Sumitomo Metal Mining Co., Ltd. | Roll-to-roll type treatment apparatus for long base material and deposition apparatus using the same |
| KR20190041506A (ko) | 2016-08-23 | 2019-04-22 | 스미토모 긴조쿠 고잔 가부시키가이샤 | 롤 투 롤 방식의 표면 처리 장치 그리고 이것을 사용한 성막 방법 및 성막 장치 |
| US11261520B2 (en) | 2016-08-23 | 2022-03-01 | Sumitomo Metal Mining Co., Ltd. | Roll-to-roll surface treatment device, and film deposition method and film deposition device using same |
| US11352697B2 (en) | 2016-08-23 | 2022-06-07 | Sumitomo Metal Mining Co., Ltd. | Apparatus for processing long base material by roll-to-roll method and film forming apparatus using the same |
| KR20200072477A (ko) | 2017-10-17 | 2020-06-22 | 스미토모 긴조쿠 고잔 가부시키가이샤 | 캔 롤과 장척 기판 처리 장치 |
| WO2019078014A1 (ja) | 2017-10-19 | 2019-04-25 | 住友金属鉱山株式会社 | キャンロールと長尺基板処理装置および長尺基板処理装置の管理方法 |
| KR20200072476A (ko) | 2017-10-19 | 2020-06-22 | 스미토모 긴조쿠 고잔 가부시키가이샤 | 캔 롤과 장척 기판 처리 장치 및 장척 기판 처리 장치의 관리 방법 |
| EP3495534A1 (en) | 2017-12-11 | 2019-06-12 | Sumitomo Metal Mining Co., Ltd. | Long substrate treatment apparatus and treatment method |
| WO2019225057A1 (ja) | 2018-05-23 | 2019-11-28 | 住友金属鉱山株式会社 | ガス放出ロール及びその製造方法並びにガス放出ロールを用いた処理装置 |
| KR20210011908A (ko) | 2018-05-23 | 2021-02-02 | 스미토모 긴조쿠 고잔 가부시키가이샤 | 가스 방출 롤 및 그 제조 방법 그리고 가스 방출 롤을 사용한 처리 장치 |
| KR20200074859A (ko) | 2018-12-17 | 2020-06-25 | 닛토덴코 가부시키가이샤 | 도전성 필름 및 도전성 필름의 제조 방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0251982B2 (enrdf_load_stackoverflow) | 1990-11-09 |
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