JPS6223014Y2 - - Google Patents

Info

Publication number
JPS6223014Y2
JPS6223014Y2 JP1980166716U JP16671680U JPS6223014Y2 JP S6223014 Y2 JPS6223014 Y2 JP S6223014Y2 JP 1980166716 U JP1980166716 U JP 1980166716U JP 16671680 U JP16671680 U JP 16671680U JP S6223014 Y2 JPS6223014 Y2 JP S6223014Y2
Authority
JP
Japan
Prior art keywords
pipe
cooling water
cooling
water
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1980166716U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5789256U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980166716U priority Critical patent/JPS6223014Y2/ja
Publication of JPS5789256U publication Critical patent/JPS5789256U/ja
Application granted granted Critical
Publication of JPS6223014Y2 publication Critical patent/JPS6223014Y2/ja
Expired legal-status Critical Current

Links

JP1980166716U 1980-11-20 1980-11-20 Expired JPS6223014Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980166716U JPS6223014Y2 (enrdf_load_stackoverflow) 1980-11-20 1980-11-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980166716U JPS6223014Y2 (enrdf_load_stackoverflow) 1980-11-20 1980-11-20

Publications (2)

Publication Number Publication Date
JPS5789256U JPS5789256U (enrdf_load_stackoverflow) 1982-06-02
JPS6223014Y2 true JPS6223014Y2 (enrdf_load_stackoverflow) 1987-06-11

Family

ID=29525358

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980166716U Expired JPS6223014Y2 (enrdf_load_stackoverflow) 1980-11-20 1980-11-20

Country Status (1)

Country Link
JP (1) JPS6223014Y2 (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2397691B (en) * 2003-01-24 2005-08-10 Leica Microsys Lithography Ltd Cooling of a device for influencing an electron beam
JP5361171B2 (ja) * 2007-11-15 2013-12-04 株式会社日立ハイテクノロジーズ 電磁コイル
JP5981245B2 (ja) * 2012-06-29 2016-08-31 京セラ株式会社 流路部材およびこれを用いた熱交換器ならびに半導体製造装置
US10486232B2 (en) 2015-04-21 2019-11-26 Varian Semiconductor Equipment Associates, Inc. Semiconductor manufacturing device with embedded fluid conduits
JP7324955B1 (ja) * 2023-01-13 2023-08-10 株式会社日立パワーソリューションズ 工業用マグネトロン
JP7324954B1 (ja) * 2023-01-13 2023-08-10 株式会社日立パワーソリューションズ 工業用マグネトロンの製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5235975A (en) * 1975-09-16 1977-03-18 Hitachi Ltd Exciting coil for electron microscope and others
JPS52104370U (enrdf_load_stackoverflow) * 1976-02-04 1977-08-08
JPS5752102Y2 (enrdf_load_stackoverflow) * 1977-01-10 1982-11-12

Also Published As

Publication number Publication date
JPS5789256U (enrdf_load_stackoverflow) 1982-06-02

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