JPS6359224B2 - - Google Patents
Info
- Publication number
- JPS6359224B2 JPS6359224B2 JP57131685A JP13168582A JPS6359224B2 JP S6359224 B2 JPS6359224 B2 JP S6359224B2 JP 57131685 A JP57131685 A JP 57131685A JP 13168582 A JP13168582 A JP 13168582A JP S6359224 B2 JPS6359224 B2 JP S6359224B2
- Authority
- JP
- Japan
- Prior art keywords
- yoke
- inner cylinder
- axis
- magnetic
- lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005291 magnetic effect Effects 0.000 claims description 37
- 230000005284 excitation Effects 0.000 claims description 10
- 230000005294 ferromagnetic effect Effects 0.000 claims description 4
- 230000004907 flux Effects 0.000 description 14
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 229910052742 iron Inorganic materials 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 2
- 230000004075 alteration Effects 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 201000009310 astigmatism Diseases 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000005281 excited state Effects 0.000 description 1
- 239000003302 ferromagnetic material Substances 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
- H01J37/141—Electromagnetic lenses
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57131685A JPS5923439A (ja) | 1982-07-28 | 1982-07-28 | 磁界レンズ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57131685A JPS5923439A (ja) | 1982-07-28 | 1982-07-28 | 磁界レンズ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5923439A JPS5923439A (ja) | 1984-02-06 |
JPS6359224B2 true JPS6359224B2 (enrdf_load_stackoverflow) | 1988-11-18 |
Family
ID=15063820
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57131685A Granted JPS5923439A (ja) | 1982-07-28 | 1982-07-28 | 磁界レンズ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5923439A (enrdf_load_stackoverflow) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2827937B2 (ja) * | 1994-11-22 | 1998-11-25 | 富士ゼロックス株式会社 | 下引き層を有する電子写真感光体および電子写真装置 |
-
1982
- 1982-07-28 JP JP57131685A patent/JPS5923439A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5923439A (ja) | 1984-02-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US5084622A (en) | Correction system for a charged-particle beam apparatus | |
JP2002516026A (ja) | 粒子−光学装置におけるレンズ欠陥補正用の補正デバイス | |
US9349565B2 (en) | Multipole lens, aberration corrector, and electron microscope | |
US10332718B1 (en) | Compact deflecting magnet | |
JPS636736A (ja) | 磁気レンズシステム | |
EP0084653A2 (en) | Composite concentric-gap magnetic lens | |
US2586559A (en) | Multiple element electron lens arrangement | |
EP3309814B1 (en) | Objective lens and transmission electron microscope | |
JPS6359224B2 (enrdf_load_stackoverflow) | ||
EP0551027B1 (en) | Magnetic focusing device | |
JPH021434B2 (enrdf_load_stackoverflow) | ||
US4468563A (en) | Electron lens | |
US5347366A (en) | Fixation structure of deflection yoke and focus magnet for projection cathode ray tube | |
JPS5953658B2 (ja) | 電子レンズ | |
US4097739A (en) | Beam deflection and focusing system for a scanning corpuscular-beam microscope | |
GB1210210A (en) | Electron beam apparatus | |
US3188465A (en) | Two stage electron beam magnification device comprising plural adjustable magnetic lens system | |
JPH0560212B2 (enrdf_load_stackoverflow) | ||
TW548664B (en) | Split magnetic lens for controlling a charged particle beam | |
JPS5914242A (ja) | 電磁レンズ | |
KR0140009Y1 (ko) | 전자 집속방식 음극선관의 집속코일 | |
JPH05128986A (ja) | 磁場型レンズ | |
KR950003276Y1 (ko) | 투사형 수상관의 포커스 마그네트 | |
HK40000572A (en) | Compact deflecting magnet | |
JPS59181447A (ja) | 電磁レンズの軸ずれ補正装置 |