JPS5923439A - 磁界レンズ - Google Patents

磁界レンズ

Info

Publication number
JPS5923439A
JPS5923439A JP57131685A JP13168582A JPS5923439A JP S5923439 A JPS5923439 A JP S5923439A JP 57131685 A JP57131685 A JP 57131685A JP 13168582 A JP13168582 A JP 13168582A JP S5923439 A JPS5923439 A JP S5923439A
Authority
JP
Japan
Prior art keywords
yoke
axis
inner cylinder
magnetic field
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57131685A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6359224B2 (enrdf_load_stackoverflow
Inventor
Yoshihiro Arai
善博 新井
Yukihisa Ishida
石田　征久
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP57131685A priority Critical patent/JPS5923439A/ja
Publication of JPS5923439A publication Critical patent/JPS5923439A/ja
Publication of JPS6359224B2 publication Critical patent/JPS6359224B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP57131685A 1982-07-28 1982-07-28 磁界レンズ Granted JPS5923439A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57131685A JPS5923439A (ja) 1982-07-28 1982-07-28 磁界レンズ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57131685A JPS5923439A (ja) 1982-07-28 1982-07-28 磁界レンズ

Publications (2)

Publication Number Publication Date
JPS5923439A true JPS5923439A (ja) 1984-02-06
JPS6359224B2 JPS6359224B2 (enrdf_load_stackoverflow) 1988-11-18

Family

ID=15063820

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57131685A Granted JPS5923439A (ja) 1982-07-28 1982-07-28 磁界レンズ

Country Status (1)

Country Link
JP (1) JPS5923439A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0715217A2 (en) 1994-11-22 1996-06-05 Fuji Xerox Co., Ltd. Photoreceptor undercoat/subbing layer containing both organometallic compound and charge transport compound

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0715217A2 (en) 1994-11-22 1996-06-05 Fuji Xerox Co., Ltd. Photoreceptor undercoat/subbing layer containing both organometallic compound and charge transport compound
US5658702A (en) * 1994-11-22 1997-08-19 Fuji Xerox Co., Ltd. Electrophotographic photoreceptor having undercoat layer containing an electron transporting pigment and reactive organometallic compound
US5815776A (en) * 1994-11-22 1998-09-29 Fuji Xerox Co., Ltd. Electrophotographic apparatus with photoreceptor having undercoat layer, containing an electronic transporting pigment and reactive organometallic compound

Also Published As

Publication number Publication date
JPS6359224B2 (enrdf_load_stackoverflow) 1988-11-18

Similar Documents

Publication Publication Date Title
US5084622A (en) Correction system for a charged-particle beam apparatus
JP2002516026A (ja) 粒子−光学装置におけるレンズ欠陥補正用の補正デバイス
JP6389671B2 (ja) 荷電粒子ビームを集束させる磁気レンズ
JPS636736A (ja) 磁気レンズシステム
US10332718B1 (en) Compact deflecting magnet
US3952198A (en) Electron lens
EP0084653A2 (en) Composite concentric-gap magnetic lens
EP3309814B1 (en) Objective lens and transmission electron microscope
JPS5923439A (ja) 磁界レンズ
JPS5953658B2 (ja) 電子レンズ
EP0551027B1 (en) Magnetic focusing device
US3588586A (en) Apparatus for correcting electron beam deflection
US4450357A (en) Electron lens equipped with three magnetic pole pieces
JPH0560212B2 (enrdf_load_stackoverflow)
JPS5914242A (ja) 電磁レンズ
TW548664B (en) Split magnetic lens for controlling a charged particle beam
JPH05128986A (ja) 磁場型レンズ
JPS59181447A (ja) 電磁レンズの軸ずれ補正装置
US4412132A (en) Electron lens equipped with three magnetic pole pieces
KR0140009Y1 (ko) 전자 집속방식 음극선관의 집속코일
KR20230123360A (ko) 하전입자 제어용 가변형 4극 자석 시스템
HK40000572A (en) Compact deflecting magnet
KR830002712B1 (ko) 전자렌즈
JPH11224845A (ja) 荷電ビーム投影光学系
JPH11317186A (ja) 荷電粒子線露光装置