JPS5789256U - - Google Patents

Info

Publication number
JPS5789256U
JPS5789256U JP16671680U JP16671680U JPS5789256U JP S5789256 U JPS5789256 U JP S5789256U JP 16671680 U JP16671680 U JP 16671680U JP 16671680 U JP16671680 U JP 16671680U JP S5789256 U JPS5789256 U JP S5789256U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16671680U
Other languages
Japanese (ja)
Other versions
JPS6223014Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980166716U priority Critical patent/JPS6223014Y2/ja
Publication of JPS5789256U publication Critical patent/JPS5789256U/ja
Application granted granted Critical
Publication of JPS6223014Y2 publication Critical patent/JPS6223014Y2/ja
Expired legal-status Critical Current

Links

JP1980166716U 1980-11-20 1980-11-20 Expired JPS6223014Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980166716U JPS6223014Y2 (enrdf_load_stackoverflow) 1980-11-20 1980-11-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980166716U JPS6223014Y2 (enrdf_load_stackoverflow) 1980-11-20 1980-11-20

Publications (2)

Publication Number Publication Date
JPS5789256U true JPS5789256U (enrdf_load_stackoverflow) 1982-06-02
JPS6223014Y2 JPS6223014Y2 (enrdf_load_stackoverflow) 1987-06-11

Family

ID=29525358

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980166716U Expired JPS6223014Y2 (enrdf_load_stackoverflow) 1980-11-20 1980-11-20

Country Status (1)

Country Link
JP (1) JPS6223014Y2 (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004228077A (ja) * 2003-01-24 2004-08-12 Leica Microsystems Lithography Ltd 電子ビームを誘導するための装置の冷却
JP2009123542A (ja) * 2007-11-15 2009-06-04 Institute Of Physical & Chemical Research 電磁コイル
JP2014011313A (ja) * 2012-06-29 2014-01-20 Kyocera Corp 流路部材およびこれを用いた熱交換器ならびに半導体製造装置
JP2018518013A (ja) * 2015-04-21 2018-07-05 ヴァリアン セミコンダクター イクイップメント アソシエイツ インコーポレイテッド 流体導管が埋め込まれた半導体製造装置
JP7324954B1 (ja) * 2023-01-13 2023-08-10 株式会社日立パワーソリューションズ 工業用マグネトロンの製造方法
JP7324955B1 (ja) * 2023-01-13 2023-08-10 株式会社日立パワーソリューションズ 工業用マグネトロン

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5235975A (en) * 1975-09-16 1977-03-18 Hitachi Ltd Exciting coil for electron microscope and others
JPS52104370U (enrdf_load_stackoverflow) * 1976-02-04 1977-08-08
JPS5397137U (enrdf_load_stackoverflow) * 1977-01-10 1978-08-07

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5235975A (en) * 1975-09-16 1977-03-18 Hitachi Ltd Exciting coil for electron microscope and others
JPS52104370U (enrdf_load_stackoverflow) * 1976-02-04 1977-08-08
JPS5397137U (enrdf_load_stackoverflow) * 1977-01-10 1978-08-07

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004228077A (ja) * 2003-01-24 2004-08-12 Leica Microsystems Lithography Ltd 電子ビームを誘導するための装置の冷却
JP2009123542A (ja) * 2007-11-15 2009-06-04 Institute Of Physical & Chemical Research 電磁コイル
JP2014011313A (ja) * 2012-06-29 2014-01-20 Kyocera Corp 流路部材およびこれを用いた熱交換器ならびに半導体製造装置
JP2018518013A (ja) * 2015-04-21 2018-07-05 ヴァリアン セミコンダクター イクイップメント アソシエイツ インコーポレイテッド 流体導管が埋め込まれた半導体製造装置
US11213891B2 (en) 2015-04-21 2022-01-04 Varian Semiconductor Equipment Associates, Inc. Semiconductor manufacturing device with embedded fluid conduits
JP7324954B1 (ja) * 2023-01-13 2023-08-10 株式会社日立パワーソリューションズ 工業用マグネトロンの製造方法
JP7324955B1 (ja) * 2023-01-13 2023-08-10 株式会社日立パワーソリューションズ 工業用マグネトロン

Also Published As

Publication number Publication date
JPS6223014Y2 (enrdf_load_stackoverflow) 1987-06-11

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