JPS62225273A - 溝つき基板の製造方法 - Google Patents
溝つき基板の製造方法Info
- Publication number
- JPS62225273A JPS62225273A JP61067437A JP6743786A JPS62225273A JP S62225273 A JPS62225273 A JP S62225273A JP 61067437 A JP61067437 A JP 61067437A JP 6743786 A JP6743786 A JP 6743786A JP S62225273 A JPS62225273 A JP S62225273A
- Authority
- JP
- Japan
- Prior art keywords
- coating film
- grooved substrate
- substrate
- grooved
- thickener
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 43
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 17
- 238000000576 coating method Methods 0.000 claims abstract description 42
- 239000011248 coating agent Substances 0.000 claims abstract description 41
- 239000002562 thickening agent Substances 0.000 claims abstract description 9
- 238000012546 transfer Methods 0.000 claims abstract description 3
- 238000000034 method Methods 0.000 claims description 15
- 239000002202 Polyethylene glycol Substances 0.000 claims description 10
- 229920001223 polyethylene glycol Polymers 0.000 claims description 10
- 150000002902 organometallic compounds Chemical class 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000006223 plastic coating Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 2
- 239000003960 organic solvent Substances 0.000 claims description 2
- 238000010304 firing Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 abstract description 10
- 239000007788 liquid Substances 0.000 abstract description 2
- 239000004033 plastic Substances 0.000 abstract description 2
- 229920003023 plastic Polymers 0.000 abstract description 2
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 abstract 2
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 abstract 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 8
- 239000011521 glass Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 4
- -1 polyethylene Polymers 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 238000003825 pressing Methods 0.000 description 3
- 239000004698 Polyethylene Substances 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 2
- 238000004132 cross linking Methods 0.000 description 2
- 238000007598 dipping method Methods 0.000 description 2
- 239000012467 final product Substances 0.000 description 2
- 238000006068 polycondensation reaction Methods 0.000 description 2
- 229920000573 polyethylene Polymers 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 238000010992 reflux Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 229920002582 Polyethylene Glycol 600 Polymers 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 125000000524 functional group Chemical group 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 239000002574 poison Substances 0.000 description 1
- 231100000614 poison Toxicity 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- QDRKDTQENPPHOJ-UHFFFAOYSA-N sodium ethoxide Chemical compound [Na+].CC[O-] QDRKDTQENPPHOJ-UHFFFAOYSA-N 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000008719 thickening Effects 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Landscapes
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
- Optical Record Carriers And Manufacture Thereof (AREA)
- Manufacturing Optical Record Carriers (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61067437A JPS62225273A (ja) | 1986-03-26 | 1986-03-26 | 溝つき基板の製造方法 |
| US07/030,892 US4810547A (en) | 1986-03-26 | 1987-03-26 | Substrate with fine grooves and method for manufacturing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61067437A JPS62225273A (ja) | 1986-03-26 | 1986-03-26 | 溝つき基板の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62225273A true JPS62225273A (ja) | 1987-10-03 |
| JPH0359752B2 JPH0359752B2 (OSRAM) | 1991-09-11 |
Family
ID=13344900
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61067437A Granted JPS62225273A (ja) | 1986-03-26 | 1986-03-26 | 溝つき基板の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62225273A (OSRAM) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03101701A (ja) * | 1990-05-24 | 1991-04-26 | Nippon Sheet Glass Co Ltd | 微細パターン付き基板の製造方法 |
| US6535680B1 (en) | 1999-09-16 | 2003-03-18 | Nippon Sheet Glass Co., Ltd. | Process for producing an article having a predetermined surface shape and optical waveguide element |
| US6721485B1 (en) | 1999-08-04 | 2004-04-13 | Nippon Sheet Glass Co., Ltd. | Echelon diffraction grating and optical waveguide element |
| US6849209B2 (en) | 2000-02-25 | 2005-02-01 | Nippon Sheet Glass Co., Ltd. | Article having predetermined surface shape and method for production thereof |
| US6849350B2 (en) | 2001-02-28 | 2005-02-01 | Nippon Sheet Glass Co., Ltd. | Article having a predetermined surface shape and method for preparation thereof |
| JP2010513006A (ja) * | 2006-12-19 | 2010-04-30 | デグサ ノヴァラ テクノロジー ソチエタ ペル アツィオーニ | ポリマー基材用の保護皮膜を製造するためのゾルゲル法 |
| JP2012099731A (ja) * | 2010-11-04 | 2012-05-24 | Ulvac Japan Ltd | 基板の製造方法 |
| US8896923B2 (en) | 2006-05-10 | 2014-11-25 | Oji Holdings Corporation | Corrugated pattern forming sheet, and methods for manufacturing antireflector, retardation plate, original process sheet plate, and optical element |
-
1986
- 1986-03-26 JP JP61067437A patent/JPS62225273A/ja active Granted
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03101701A (ja) * | 1990-05-24 | 1991-04-26 | Nippon Sheet Glass Co Ltd | 微細パターン付き基板の製造方法 |
| US6721485B1 (en) | 1999-08-04 | 2004-04-13 | Nippon Sheet Glass Co., Ltd. | Echelon diffraction grating and optical waveguide element |
| US6535680B1 (en) | 1999-09-16 | 2003-03-18 | Nippon Sheet Glass Co., Ltd. | Process for producing an article having a predetermined surface shape and optical waveguide element |
| US6849209B2 (en) | 2000-02-25 | 2005-02-01 | Nippon Sheet Glass Co., Ltd. | Article having predetermined surface shape and method for production thereof |
| US6849350B2 (en) | 2001-02-28 | 2005-02-01 | Nippon Sheet Glass Co., Ltd. | Article having a predetermined surface shape and method for preparation thereof |
| US8896923B2 (en) | 2006-05-10 | 2014-11-25 | Oji Holdings Corporation | Corrugated pattern forming sheet, and methods for manufacturing antireflector, retardation plate, original process sheet plate, and optical element |
| JP2010513006A (ja) * | 2006-12-19 | 2010-04-30 | デグサ ノヴァラ テクノロジー ソチエタ ペル アツィオーニ | ポリマー基材用の保護皮膜を製造するためのゾルゲル法 |
| JP2012099731A (ja) * | 2010-11-04 | 2012-05-24 | Ulvac Japan Ltd | 基板の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0359752B2 (OSRAM) | 1991-09-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |