JPS6222263B2 - - Google Patents

Info

Publication number
JPS6222263B2
JPS6222263B2 JP56071075A JP7107581A JPS6222263B2 JP S6222263 B2 JPS6222263 B2 JP S6222263B2 JP 56071075 A JP56071075 A JP 56071075A JP 7107581 A JP7107581 A JP 7107581A JP S6222263 B2 JPS6222263 B2 JP S6222263B2
Authority
JP
Japan
Prior art keywords
photoresist
etching
positive photoresist
resist
positive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56071075A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57186330A (en
Inventor
Seiji Ueda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP7107581A priority Critical patent/JPS57186330A/ja
Publication of JPS57186330A publication Critical patent/JPS57186330A/ja
Publication of JPS6222263B2 publication Critical patent/JPS6222263B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/42—Stripping or agents therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
JP7107581A 1981-05-12 1981-05-12 Removing method for photoresist Granted JPS57186330A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7107581A JPS57186330A (en) 1981-05-12 1981-05-12 Removing method for photoresist

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7107581A JPS57186330A (en) 1981-05-12 1981-05-12 Removing method for photoresist

Publications (2)

Publication Number Publication Date
JPS57186330A JPS57186330A (en) 1982-11-16
JPS6222263B2 true JPS6222263B2 (enExample) 1987-05-16

Family

ID=13450033

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7107581A Granted JPS57186330A (en) 1981-05-12 1981-05-12 Removing method for photoresist

Country Status (1)

Country Link
JP (1) JPS57186330A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0294911A (ja) * 1988-09-30 1990-04-05 Toshiba Corp 弾性表面波素子の製造方法
JP4678665B2 (ja) * 2001-11-15 2011-04-27 東京エレクトロン株式会社 基板処理方法および基板処理装置
CN110571138A (zh) * 2018-06-05 2019-12-13 中芯国际集成电路制造(上海)有限公司 半导体器件的制作方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4914682A (enExample) * 1972-06-05 1974-02-08
DE2326447C2 (de) * 1973-05-24 1986-02-06 Ibm Deutschland Gmbh, 7000 Stuttgart Verfahren zum Entfernen von Schichten aus organischem Material und seine Verwendung
JPS52100234A (en) * 1976-02-19 1977-08-23 Sony Corp Stripping solution of photosolubilizable light sensitive resin
JPS5336363A (en) * 1976-09-14 1978-04-04 Matsushita Electric Works Ltd Electric razor

Also Published As

Publication number Publication date
JPS57186330A (en) 1982-11-16

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