JPS62211236A - 板状体の保持装置 - Google Patents

板状体の保持装置

Info

Publication number
JPS62211236A
JPS62211236A JP5245686A JP5245686A JPS62211236A JP S62211236 A JPS62211236 A JP S62211236A JP 5245686 A JP5245686 A JP 5245686A JP 5245686 A JP5245686 A JP 5245686A JP S62211236 A JPS62211236 A JP S62211236A
Authority
JP
Japan
Prior art keywords
plate
holding
fluid
gap
shaped body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5245686A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0446864B2 (cs
Inventor
Hiromitsu Tokisue
裕充 時末
Nobuo Tsumaki
妻木　伸夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP5245686A priority Critical patent/JPS62211236A/ja
Publication of JPS62211236A publication Critical patent/JPS62211236A/ja
Publication of JPH0446864B2 publication Critical patent/JPH0446864B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Manipulator (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP5245686A 1986-03-12 1986-03-12 板状体の保持装置 Granted JPS62211236A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5245686A JPS62211236A (ja) 1986-03-12 1986-03-12 板状体の保持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5245686A JPS62211236A (ja) 1986-03-12 1986-03-12 板状体の保持装置

Publications (2)

Publication Number Publication Date
JPS62211236A true JPS62211236A (ja) 1987-09-17
JPH0446864B2 JPH0446864B2 (cs) 1992-07-31

Family

ID=12915219

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5245686A Granted JPS62211236A (ja) 1986-03-12 1986-03-12 板状体の保持装置

Country Status (1)

Country Link
JP (1) JPS62211236A (cs)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0241841A (ja) * 1988-08-01 1990-02-13 Hitachi Ltd 非平面形状を有する物体の保持装置
EP0383336A3 (en) * 1989-02-17 1990-10-10 Hitachi, Ltd. Article assembling method and device
US4969676A (en) * 1989-06-23 1990-11-13 At&T Bell Laboratories Air pressure pick-up tool
US5169196A (en) * 1991-06-17 1992-12-08 Safabakhsh Ali R Non-contact pick-up head
US6099056A (en) * 1996-05-31 2000-08-08 Ipec Precision, Inc. Non-contact holder for wafer-like articles
KR100916673B1 (ko) 2006-10-02 2009-09-08 에스엠씨 가부시키 가이샤 비접촉 반송장치
WO2011027547A1 (ja) * 2009-09-07 2011-03-10 村田機械株式会社 基板移載装置
EP2456694A2 (de) * 2009-07-22 2012-05-30 Zimmermann & Schilp Handhabungstechnik GmbH Vakuum-greifer
GB2584069A (en) * 2019-03-27 2020-11-25 Millitec Food Systems Ltd Flow gripper

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5525037A (en) * 1978-08-09 1980-02-22 Seiko Epson Corp Liquid form material injecting of display body
JPS5918435U (ja) * 1982-07-27 1984-02-04 日本電気ホームエレクトロニクス株式会社 非接触型ウエ−ハチヤツク

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5525037A (en) * 1978-08-09 1980-02-22 Seiko Epson Corp Liquid form material injecting of display body
JPS5918435U (ja) * 1982-07-27 1984-02-04 日本電気ホームエレクトロニクス株式会社 非接触型ウエ−ハチヤツク

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0241841A (ja) * 1988-08-01 1990-02-13 Hitachi Ltd 非平面形状を有する物体の保持装置
EP0383336A3 (en) * 1989-02-17 1990-10-10 Hitachi, Ltd. Article assembling method and device
US5077888A (en) * 1989-02-17 1992-01-07 Hitachi, Ltd. Article assembling method and device
US4969676A (en) * 1989-06-23 1990-11-13 At&T Bell Laboratories Air pressure pick-up tool
US5169196A (en) * 1991-06-17 1992-12-08 Safabakhsh Ali R Non-contact pick-up head
US6099056A (en) * 1996-05-31 2000-08-08 Ipec Precision, Inc. Non-contact holder for wafer-like articles
KR100916673B1 (ko) 2006-10-02 2009-09-08 에스엠씨 가부시키 가이샤 비접촉 반송장치
US7690869B2 (en) 2006-10-02 2010-04-06 Smc Kabushiki Kaisha Non-contact transport apparatus
EP2456694A2 (de) * 2009-07-22 2012-05-30 Zimmermann & Schilp Handhabungstechnik GmbH Vakuum-greifer
JP2012533491A (ja) * 2009-07-22 2012-12-27 ジメルマン アンド シルプ アンダバングステクニック ゲーエムベーハー 真空グリッパー
WO2011027547A1 (ja) * 2009-09-07 2011-03-10 村田機械株式会社 基板移載装置
GB2584069A (en) * 2019-03-27 2020-11-25 Millitec Food Systems Ltd Flow gripper
GB2584069B (en) * 2019-03-27 2023-11-08 Millitec Food Systems Ltd Flow gripper

Also Published As

Publication number Publication date
JPH0446864B2 (cs) 1992-07-31

Similar Documents

Publication Publication Date Title
US4081201A (en) Wafer air film transportation system
JPS62211236A (ja) 板状体の保持装置
US20170284462A1 (en) Air bearing
JP5921323B2 (ja) 搬送保持具及び搬送保持装置
JP2011236006A (ja) 非接触搬送装置
US11642794B2 (en) Suction device
US6969224B2 (en) Workpiece levitating device
JP6744630B2 (ja) 邪魔板
JP2619436B2 (ja) 板状体の保持装置
TW201505948A (zh) 支撐用空氣板及其氣體流阻擋器
JP4877690B2 (ja) 静圧スライダ
JPH0512113B2 (cs)
JP7087357B2 (ja) ポッド及びパージ装置
JPH02138044A (ja) 板状体の保持装置
JP2006135083A (ja) 非接触支持装置
JP4494179B2 (ja) 非接触支持装置
JPH11268830A (ja) 気流搬送セル
JP2002280439A (ja) 搬送装置
JP4376641B2 (ja) エア浮上式コンベア
JPH05335404A (ja) 無接触保持装置
JPH0640560A (ja) 無接触保持装置
JPH07317767A (ja) 静圧気体軸受
US10962053B2 (en) Air bearing
EP0043457A2 (en) Air film transportation device
JP3660779B2 (ja) 静圧気体軸受装置