JPS6220483B2 - - Google Patents

Info

Publication number
JPS6220483B2
JPS6220483B2 JP6898681A JP6898681A JPS6220483B2 JP S6220483 B2 JPS6220483 B2 JP S6220483B2 JP 6898681 A JP6898681 A JP 6898681A JP 6898681 A JP6898681 A JP 6898681A JP S6220483 B2 JPS6220483 B2 JP S6220483B2
Authority
JP
Japan
Prior art keywords
measured
moire
double
signal
moiré
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6898681A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57184918A (en
Inventor
Yoshio Sakurai
Takeo Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KOKU UCHU GIJUTSU KENKYU SHOCHO
Original Assignee
KOKU UCHU GIJUTSU KENKYU SHOCHO
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KOKU UCHU GIJUTSU KENKYU SHOCHO filed Critical KOKU UCHU GIJUTSU KENKYU SHOCHO
Priority to JP6898681A priority Critical patent/JPS57184918A/ja
Publication of JPS57184918A publication Critical patent/JPS57184918A/ja
Publication of JPS6220483B2 publication Critical patent/JPS6220483B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP6898681A 1981-05-08 1981-05-08 Measurement of fine displacement Granted JPS57184918A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6898681A JPS57184918A (en) 1981-05-08 1981-05-08 Measurement of fine displacement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6898681A JPS57184918A (en) 1981-05-08 1981-05-08 Measurement of fine displacement

Publications (2)

Publication Number Publication Date
JPS57184918A JPS57184918A (en) 1982-11-13
JPS6220483B2 true JPS6220483B2 (enrdf_load_html_response) 1987-05-07

Family

ID=13389488

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6898681A Granted JPS57184918A (en) 1981-05-08 1981-05-08 Measurement of fine displacement

Country Status (1)

Country Link
JP (1) JPS57184918A (enrdf_load_html_response)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11784266B2 (en) 2021-09-10 2023-10-10 Shanghai Jinko Green Energy Enterprise Management Co., Ltd. Solar cell, method for preparing same and solar cell module

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6095316A (ja) * 1983-10-31 1985-05-28 Shimadzu Corp 変位測定方法
AU695768B2 (en) * 1996-02-09 1998-08-20 Tetra Laval Holdings & Finance Sa Device and method for checking patterns disposed on a material strip and the material strip
US6188058B1 (en) * 1998-09-17 2001-02-13 Agilent Technologies Inc. System for taking displacement measurements having photosensors with imaged pattern arrangement
WO2000043734A1 (fr) * 1999-01-22 2000-07-27 Citizen Watch Co., Ltd. Instrument optique servant a mesurer un deplacement
JP5098067B2 (ja) * 2007-03-06 2012-12-12 有限会社 ミクロデント 定量化規格化顕微鏡装置
JP5339127B2 (ja) * 2008-12-10 2013-11-13 株式会社ニコン アブソリュートエンコーダ及びエンコーダ、並びに移動体装置
JP2015184059A (ja) * 2014-03-20 2015-10-22 旭硝子株式会社 透明板状体検査方法および透明板状体検査装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11784266B2 (en) 2021-09-10 2023-10-10 Shanghai Jinko Green Energy Enterprise Management Co., Ltd. Solar cell, method for preparing same and solar cell module

Also Published As

Publication number Publication date
JPS57184918A (en) 1982-11-13

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