JPS57184918A - Measurement of fine displacement - Google Patents

Measurement of fine displacement

Info

Publication number
JPS57184918A
JPS57184918A JP6898681A JP6898681A JPS57184918A JP S57184918 A JPS57184918 A JP S57184918A JP 6898681 A JP6898681 A JP 6898681A JP 6898681 A JP6898681 A JP 6898681A JP S57184918 A JPS57184918 A JP S57184918A
Authority
JP
Japan
Prior art keywords
measured
pitch
lattice pattern
fine displacement
displacement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6898681A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6220483B2 (enrdf_load_html_response
Inventor
Yoshio Sakurai
Takeo Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Aerospace Laboratory of Japan
Original Assignee
National Aerospace Laboratory of Japan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Aerospace Laboratory of Japan filed Critical National Aerospace Laboratory of Japan
Priority to JP6898681A priority Critical patent/JPS57184918A/ja
Publication of JPS57184918A publication Critical patent/JPS57184918A/ja
Publication of JPS6220483B2 publication Critical patent/JPS6220483B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36Forming the light into pulses
    • G01D5/38Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP6898681A 1981-05-08 1981-05-08 Measurement of fine displacement Granted JPS57184918A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6898681A JPS57184918A (en) 1981-05-08 1981-05-08 Measurement of fine displacement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6898681A JPS57184918A (en) 1981-05-08 1981-05-08 Measurement of fine displacement

Publications (2)

Publication Number Publication Date
JPS57184918A true JPS57184918A (en) 1982-11-13
JPS6220483B2 JPS6220483B2 (enrdf_load_html_response) 1987-05-07

Family

ID=13389488

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6898681A Granted JPS57184918A (en) 1981-05-08 1981-05-08 Measurement of fine displacement

Country Status (1)

Country Link
JP (1) JPS57184918A (enrdf_load_html_response)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6095316A (ja) * 1983-10-31 1985-05-28 Shimadzu Corp 変位測定方法
JP2000097639A (ja) * 1998-09-17 2000-04-07 Agilent Technol Inc 変位測定装置
WO2000043734A1 (fr) * 1999-01-22 2000-07-27 Citizen Watch Co., Ltd. Instrument optique servant a mesurer un deplacement
US6302330B1 (en) * 1996-02-09 2001-10-16 Tetra Laval Holdings & Finance S.A. Material strip with arranged groups of dark and light areas
JP2008216086A (ja) * 2007-03-06 2008-09-18 Microdent:Kk 定量化規格化(位相差)顕微鏡装置
JP2010139334A (ja) * 2008-12-10 2010-06-24 Nikon Corp アブソリュートエンコーダ及び移動体装置
JP2015184059A (ja) * 2014-03-20 2015-10-22 旭硝子株式会社 透明板状体検査方法および透明板状体検査装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115188834B (zh) 2021-09-10 2023-09-22 上海晶科绿能企业管理有限公司 太阳能电池及其制备方法、光伏组件

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6095316A (ja) * 1983-10-31 1985-05-28 Shimadzu Corp 変位測定方法
US6302330B1 (en) * 1996-02-09 2001-10-16 Tetra Laval Holdings & Finance S.A. Material strip with arranged groups of dark and light areas
JP2000097639A (ja) * 1998-09-17 2000-04-07 Agilent Technol Inc 変位測定装置
WO2000043734A1 (fr) * 1999-01-22 2000-07-27 Citizen Watch Co., Ltd. Instrument optique servant a mesurer un deplacement
US6707029B1 (en) 1999-01-22 2004-03-16 Citizen Watch Co., Ltd. Optical displacement measuring apparatus having light receiving arrays
JP2008216086A (ja) * 2007-03-06 2008-09-18 Microdent:Kk 定量化規格化(位相差)顕微鏡装置
JP2010139334A (ja) * 2008-12-10 2010-06-24 Nikon Corp アブソリュートエンコーダ及び移動体装置
JP2015184059A (ja) * 2014-03-20 2015-10-22 旭硝子株式会社 透明板状体検査方法および透明板状体検査装置

Also Published As

Publication number Publication date
JPS6220483B2 (enrdf_load_html_response) 1987-05-07

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