JPS57184918A - Measurement of fine displacement - Google Patents
Measurement of fine displacementInfo
- Publication number
- JPS57184918A JPS57184918A JP6898681A JP6898681A JPS57184918A JP S57184918 A JPS57184918 A JP S57184918A JP 6898681 A JP6898681 A JP 6898681A JP 6898681 A JP6898681 A JP 6898681A JP S57184918 A JPS57184918 A JP S57184918A
- Authority
- JP
- Japan
- Prior art keywords
- measured
- pitch
- lattice pattern
- fine displacement
- displacement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6898681A JPS57184918A (en) | 1981-05-08 | 1981-05-08 | Measurement of fine displacement |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6898681A JPS57184918A (en) | 1981-05-08 | 1981-05-08 | Measurement of fine displacement |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57184918A true JPS57184918A (en) | 1982-11-13 |
JPS6220483B2 JPS6220483B2 (enrdf_load_html_response) | 1987-05-07 |
Family
ID=13389488
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6898681A Granted JPS57184918A (en) | 1981-05-08 | 1981-05-08 | Measurement of fine displacement |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57184918A (enrdf_load_html_response) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6095316A (ja) * | 1983-10-31 | 1985-05-28 | Shimadzu Corp | 変位測定方法 |
JP2000097639A (ja) * | 1998-09-17 | 2000-04-07 | Agilent Technol Inc | 変位測定装置 |
WO2000043734A1 (fr) * | 1999-01-22 | 2000-07-27 | Citizen Watch Co., Ltd. | Instrument optique servant a mesurer un deplacement |
US6302330B1 (en) * | 1996-02-09 | 2001-10-16 | Tetra Laval Holdings & Finance S.A. | Material strip with arranged groups of dark and light areas |
JP2008216086A (ja) * | 2007-03-06 | 2008-09-18 | Microdent:Kk | 定量化規格化(位相差)顕微鏡装置 |
JP2010139334A (ja) * | 2008-12-10 | 2010-06-24 | Nikon Corp | アブソリュートエンコーダ及び移動体装置 |
JP2015184059A (ja) * | 2014-03-20 | 2015-10-22 | 旭硝子株式会社 | 透明板状体検査方法および透明板状体検査装置 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115188834B (zh) | 2021-09-10 | 2023-09-22 | 上海晶科绿能企业管理有限公司 | 太阳能电池及其制备方法、光伏组件 |
-
1981
- 1981-05-08 JP JP6898681A patent/JPS57184918A/ja active Granted
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6095316A (ja) * | 1983-10-31 | 1985-05-28 | Shimadzu Corp | 変位測定方法 |
US6302330B1 (en) * | 1996-02-09 | 2001-10-16 | Tetra Laval Holdings & Finance S.A. | Material strip with arranged groups of dark and light areas |
JP2000097639A (ja) * | 1998-09-17 | 2000-04-07 | Agilent Technol Inc | 変位測定装置 |
WO2000043734A1 (fr) * | 1999-01-22 | 2000-07-27 | Citizen Watch Co., Ltd. | Instrument optique servant a mesurer un deplacement |
US6707029B1 (en) | 1999-01-22 | 2004-03-16 | Citizen Watch Co., Ltd. | Optical displacement measuring apparatus having light receiving arrays |
JP2008216086A (ja) * | 2007-03-06 | 2008-09-18 | Microdent:Kk | 定量化規格化(位相差)顕微鏡装置 |
JP2010139334A (ja) * | 2008-12-10 | 2010-06-24 | Nikon Corp | アブソリュートエンコーダ及び移動体装置 |
JP2015184059A (ja) * | 2014-03-20 | 2015-10-22 | 旭硝子株式会社 | 透明板状体検査方法および透明板状体検査装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS6220483B2 (enrdf_load_html_response) | 1987-05-07 |
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