JPS62199763A - ＴｉＮ膜の形成法 - Google Patents
ＴｉＮ膜の形成法Info
- Publication number
- JPS62199763A JPS62199763A JP3964086A JP3964086A JPS62199763A JP S62199763 A JPS62199763 A JP S62199763A JP 3964086 A JP3964086 A JP 3964086A JP 3964086 A JP3964086 A JP 3964086A JP S62199763 A JPS62199763 A JP S62199763A
- Authority
- JP
- Japan
- Prior art keywords
- base material
- tin film
- ion
- ion beam
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 title claims abstract description 31
- 230000015572 biosynthetic process Effects 0.000 title description 2
- 239000000463 material Substances 0.000 claims abstract description 43
- 238000010884 ion-beam technique Methods 0.000 claims abstract description 23
- 238000000034 method Methods 0.000 claims abstract description 22
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 11
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 7
- 230000001133 acceleration Effects 0.000 claims abstract description 4
- 238000001704 evaporation Methods 0.000 abstract description 9
- 238000010894 electron beam technology Methods 0.000 abstract description 4
- 230000001678 irradiating effect Effects 0.000 abstract description 4
- 238000010438 heat treatment Methods 0.000 abstract description 3
- 238000009751 slip forming Methods 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 22
- 239000000758 substrate Substances 0.000 description 16
- 238000005260 corrosion Methods 0.000 description 7
- 230000007797 corrosion Effects 0.000 description 7
- 239000010936 titanium Substances 0.000 description 7
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 5
- 230000008020 evaporation Effects 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 229910052719 titanium Inorganic materials 0.000 description 5
- 238000005566 electron beam evaporation Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 241000269821 Scombridae Species 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005034 decoration Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 235000020640 mackerel Nutrition 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910001105 martensitic stainless steel Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3964086A JPS62199763A (ja) | 1986-02-25 | 1986-02-25 | ＴｉＮ膜の形成法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3964086A JPS62199763A (ja) | 1986-02-25 | 1986-02-25 | ＴｉＮ膜の形成法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1236361A Division JPH0686657B2 (ja) | 1989-09-11 | 1989-09-11 | 薄膜形成装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62199763A true JPS62199763A (ja) | 1987-09-03 |
| JPH0551661B2 JPH0551661B2 (enrdf_load_stackoverflow) | 1993-08-03 |
Family
ID=12558688
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3964086A Granted JPS62199763A (ja) | 1986-02-25 | 1986-02-25 | ＴｉＮ膜の形成法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62199763A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01215966A (ja) * | 1988-02-23 | 1989-08-29 | Nissin Electric Co Ltd | 高硬度ＴｉＮ膜の製造方法 |
| JPH03177570A (ja) * | 1989-12-05 | 1991-08-01 | Raimuzu:Kk | 複合硬質材料の製造方法 |
| CN111893439A (zh) * | 2020-08-11 | 2020-11-06 | 苏州众智泽智能科技有限公司 | 具有氮化钛硬质涂层的个人饰品的制备方法 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58181864A (ja) * | 1982-04-16 | 1983-10-24 | Sumitomo Electric Ind Ltd | 表面処理方法 |
| JPS6115967A (ja) * | 1984-06-29 | 1986-01-24 | Sumitomo Electric Ind Ltd | 表面処理方法 |
| JPS61195971A (ja) * | 1985-02-25 | 1986-08-30 | Kobe Steel Ltd | 耐摩耗性皮膜の形成方法 |
-
1986
- 1986-02-25 JP JP3964086A patent/JPS62199763A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58181864A (ja) * | 1982-04-16 | 1983-10-24 | Sumitomo Electric Ind Ltd | 表面処理方法 |
| JPS6115967A (ja) * | 1984-06-29 | 1986-01-24 | Sumitomo Electric Ind Ltd | 表面処理方法 |
| JPS61195971A (ja) * | 1985-02-25 | 1986-08-30 | Kobe Steel Ltd | 耐摩耗性皮膜の形成方法 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01215966A (ja) * | 1988-02-23 | 1989-08-29 | Nissin Electric Co Ltd | 高硬度ＴｉＮ膜の製造方法 |
| JPH03177570A (ja) * | 1989-12-05 | 1991-08-01 | Raimuzu:Kk | 複合硬質材料の製造方法 |
| CN111893439A (zh) * | 2020-08-11 | 2020-11-06 | 苏州众智泽智能科技有限公司 | 具有氮化钛硬质涂层的个人饰品的制备方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0551661B2 (enrdf_load_stackoverflow) | 1993-08-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5346600A (en) | Plasma-enhanced magnetron-sputtered deposition of materials | |
| DE59607810D1 (de) | Korrosionsgeschütztes Stahlfeinblech und Verfahren zu seiner Herstellung | |
| JPS62199763A (ja) | ＴｉＮ膜の形成法 | |
| JPH01129958A (ja) | 高密着窒化チタン膜形成方法 | |
| JPH02149661A (ja) | 薄膜形成方法およびその装置 | |
| US3968270A (en) | Process for preparation of metal coatings | |
| JPH0784642B2 (ja) | 被処理物の表面に被膜を形成する方法 | |
| JPH02163366A (ja) | 鉄又は、鋼材料表面へのクロム層形成方法 | |
| JPH01168857A (ja) | 窒化チタン膜の形成方法 | |
| JP2714072B2 (ja) | ダイナミツクミキシングによる窒化チタン膜の形成方法 | |
| JPS62253762A (ja) | Ｚｎ合金の蒸着方法 | |
| JP2600092B2 (ja) | 金属系材料の表面改質方法 | |
| JPS6342362A (ja) | 表面被覆鋼材の製造方法 | |
| JPS5836671B2 (ja) | 表面処理方法 | |
| RU2659537C1 (ru) | Способ нанесения смешанного углеродно-азотного защитного покрытия для повышения коррозионной стойкости железа | |
| JPH02259063A (ja) | 金属膜生成方法 | |
| JP2634487B2 (ja) | イオンプレーティングによる耐摩耗性被膜形成法 | |
| JPS6320445A (ja) | イオンプレ−テイング | |
| JPH03166370A (ja) | 硬質炭素膜のコーティング方法 | |
| JPH07233466A (ja) | 耐食性金属物品及びその製造方法 | |
| JPS63262457A (ja) | 窒化ホウ素膜の作製方法 | |
| JP3074056B2 (ja) | 蒸着Ｚｎめっき鋼板の製造方法 | |
| JPH05320876A (ja) | 耐食性金属物品及びその製造方法 | |
| JPH0823064B2 (ja) | 耐食性にすぐれたＺｎ―Ｔｉ合金めっき鋼板の製造法 | |
| EP1029941A2 (en) | Thin film deposition plant with differentiated sectors for plasma assisted techniques |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |