JPS62171903A - 窒化アルミニウムと炭化アルミニウムよりなる混合微粉末の合成方法 - Google Patents

窒化アルミニウムと炭化アルミニウムよりなる混合微粉末の合成方法

Info

Publication number
JPS62171903A
JPS62171903A JP61014134A JP1413486A JPS62171903A JP S62171903 A JPS62171903 A JP S62171903A JP 61014134 A JP61014134 A JP 61014134A JP 1413486 A JP1413486 A JP 1413486A JP S62171903 A JPS62171903 A JP S62171903A
Authority
JP
Japan
Prior art keywords
powder
gas
mixed
plasma
al4c3
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61014134A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0524850B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Kazuhiro Baba
和宏 馬場
Nobuaki Shohata
伸明 正畑
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP61014134A priority Critical patent/JPS62171903A/ja
Publication of JPS62171903A publication Critical patent/JPS62171903A/ja
Publication of JPH0524850B2 publication Critical patent/JPH0524850B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/072—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with aluminium
    • C01B21/0722—Preparation by direct nitridation of aluminium
    • C01B21/0724—Preparation by direct nitridation of aluminium using a plasma

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Products (AREA)
JP61014134A 1986-01-24 1986-01-24 窒化アルミニウムと炭化アルミニウムよりなる混合微粉末の合成方法 Granted JPS62171903A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61014134A JPS62171903A (ja) 1986-01-24 1986-01-24 窒化アルミニウムと炭化アルミニウムよりなる混合微粉末の合成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61014134A JPS62171903A (ja) 1986-01-24 1986-01-24 窒化アルミニウムと炭化アルミニウムよりなる混合微粉末の合成方法

Publications (2)

Publication Number Publication Date
JPS62171903A true JPS62171903A (ja) 1987-07-28
JPH0524850B2 JPH0524850B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-04-09

Family

ID=11852663

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61014134A Granted JPS62171903A (ja) 1986-01-24 1986-01-24 窒化アルミニウムと炭化アルミニウムよりなる混合微粉末の合成方法

Country Status (1)

Country Link
JP (1) JPS62171903A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50160199A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1974-06-20 1975-12-25
JPS52128900A (en) * 1976-02-17 1977-10-28 Montedison Spa Plasmaarc method for producing particulate ceramic metal and similar products
JPS60180906A (ja) * 1984-02-28 1985-09-14 Tokuyama Soda Co Ltd 窒化アルミニウム粉末からカ−ボン粉末を除去する方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50160199A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1974-06-20 1975-12-25
JPS52128900A (en) * 1976-02-17 1977-10-28 Montedison Spa Plasmaarc method for producing particulate ceramic metal and similar products
JPS60180906A (ja) * 1984-02-28 1985-09-14 Tokuyama Soda Co Ltd 窒化アルミニウム粉末からカ−ボン粉末を除去する方法

Also Published As

Publication number Publication date
JPH0524850B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-04-09

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