JPS6216586A - 超伝導集積回路の製造方法 - Google Patents

超伝導集積回路の製造方法

Info

Publication number
JPS6216586A
JPS6216586A JP60155262A JP15526285A JPS6216586A JP S6216586 A JPS6216586 A JP S6216586A JP 60155262 A JP60155262 A JP 60155262A JP 15526285 A JP15526285 A JP 15526285A JP S6216586 A JPS6216586 A JP S6216586A
Authority
JP
Japan
Prior art keywords
film
superconducting
thin film
etching
integrated circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60155262A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0376792B2 (enrdf_load_stackoverflow
Inventor
Takeshi Imamura
健 今村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP60155262A priority Critical patent/JPS6216586A/ja
Publication of JPS6216586A publication Critical patent/JPS6216586A/ja
Publication of JPH0376792B2 publication Critical patent/JPH0376792B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N69/00—Integrated devices, or assemblies of multiple devices, comprising at least one superconducting element covered by group H10N60/00

Landscapes

  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
JP60155262A 1985-07-16 1985-07-16 超伝導集積回路の製造方法 Granted JPS6216586A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60155262A JPS6216586A (ja) 1985-07-16 1985-07-16 超伝導集積回路の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60155262A JPS6216586A (ja) 1985-07-16 1985-07-16 超伝導集積回路の製造方法

Publications (2)

Publication Number Publication Date
JPS6216586A true JPS6216586A (ja) 1987-01-24
JPH0376792B2 JPH0376792B2 (enrdf_load_stackoverflow) 1991-12-06

Family

ID=15602068

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60155262A Granted JPS6216586A (ja) 1985-07-16 1985-07-16 超伝導集積回路の製造方法

Country Status (1)

Country Link
JP (1) JPS6216586A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6474769A (en) * 1987-09-17 1989-03-20 Fujitsu Ltd Contact structure of superconductive film and normal conductive film

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5978586A (ja) * 1982-10-27 1984-05-07 Hitachi Ltd Ｎｂのパタ−ン形成法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5978586A (ja) * 1982-10-27 1984-05-07 Hitachi Ltd Ｎｂのパタ−ン形成法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6474769A (en) * 1987-09-17 1989-03-20 Fujitsu Ltd Contact structure of superconductive film and normal conductive film

Also Published As

Publication number Publication date
JPH0376792B2 (enrdf_load_stackoverflow) 1991-12-06

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term