JPS62142760A - 真空蒸着装置 - Google Patents

真空蒸着装置

Info

Publication number
JPS62142760A
JPS62142760A JP60283466A JP28346685A JPS62142760A JP S62142760 A JPS62142760 A JP S62142760A JP 60283466 A JP60283466 A JP 60283466A JP 28346685 A JP28346685 A JP 28346685A JP S62142760 A JPS62142760 A JP S62142760A
Authority
JP
Japan
Prior art keywords
cooling base
evaporated
crucible
crucibles
vacuum evaporation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60283466A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0379434B2 (enrdf_load_stackoverflow
Inventor
Kunio Tanaka
田中　邦生
Tanejiro Ikeda
池田　種次郎
Masahide Yokoyama
政秀 横山
Hidetoshi Kawa
川　秀俊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP60283466A priority Critical patent/JPS62142760A/ja
Publication of JPS62142760A publication Critical patent/JPS62142760A/ja
Publication of JPH0379434B2 publication Critical patent/JPH0379434B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP60283466A 1985-12-17 1985-12-17 真空蒸着装置 Granted JPS62142760A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60283466A JPS62142760A (ja) 1985-12-17 1985-12-17 真空蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60283466A JPS62142760A (ja) 1985-12-17 1985-12-17 真空蒸着装置

Publications (2)

Publication Number Publication Date
JPS62142760A true JPS62142760A (ja) 1987-06-26
JPH0379434B2 JPH0379434B2 (enrdf_load_stackoverflow) 1991-12-18

Family

ID=17665907

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60283466A Granted JPS62142760A (ja) 1985-12-17 1985-12-17 真空蒸着装置

Country Status (1)

Country Link
JP (1) JPS62142760A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007138235A (ja) * 2005-11-17 2007-06-07 Tokki Corp 電子ビーム真空蒸着方法およびその装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007138235A (ja) * 2005-11-17 2007-06-07 Tokki Corp 電子ビーム真空蒸着方法およびその装置

Also Published As

Publication number Publication date
JPH0379434B2 (enrdf_load_stackoverflow) 1991-12-18

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